Apollo Stripper

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By TRION

Supplier Info

Product Type:

Equipment

Application:

Dry Processing & UHP

Product Description:

The cost of new stripping systems has escalated to unreasonable levels. Trion has solved this critical problem. The Apollo Stripper is a compact, inexpensive, and versatile system that can be configured for a 200 mm or 300 mm Chuck. By employing RF bias power, difficult-to-remove layers of resist can be removed at low temperatures. As required by the application, this system can incorporate a microwave source (which is both reliable and free from typical microwave tuning problems) or ICP technology.

  • Etch rates up to 6 μm/min
  • High throughput
  • Low plasma damage
  • Automatic tuning
  • 100 mm to 300 mm wafers
  • Small footprint
  • Competitively priced

MEMS, Compound Semiconductor, Pilot Line Production.

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