By R2D (Italy and UK only)
Supplier Info
Product Type:
Equipment
Application:
Automation
Product Description:
The LINA System is a new generation of Boat Auto Loader for Horizontal furnace.
Using a Cartesian lift, the LINA will automatically load/unload multiple types of boat from Furnace paddle to buffer/Load port and back.
With its multiple boat handling system, we can manage different process avoiding cross contamination.
The LINA coupled with a shuttle and a Comet wafer transfer system could provide a full complete handling solution.
Benefit
- The LINA lift can be removed for maintenance purposes.
- Integration possible for a Comet with wafer transfer system
- Small footprint.
- Customized according to customer boat
Options
- SECS/GEM Communication
- Comet batch wafer transfer
- Shuttle
- FFU
- Notch aligning
- Automatic BCR and RFID or bar code gun
- Process Boat Buffer
- Ionizer
Software
- Friendly and intuitive
- Wafer recoveries
- Easy integration with other systems by SECII-GEM, ASCII, RS, TCPIP
CE CERTIFICATION
SEMI STANDARD
CLASS 1
Performance
UPTIME: 99.8%
MTBF: > 4000 HOURS
MTTR: < 1 HOUR
Cycle Time: < 1Min (load boat from LP to Paddle)
Loading / Unloading: < 2Min for 8 boats ( 6 process boat + 2 buffer / Dummies boat)
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