By R2D (Italy and UK only)
Supplier Info
Product Type:
Equipment
Application:
Wafer Handling
Product Description:
The COMET 3 station is the Operator’s favorite mass wafer transfer system. This machine allows the transfer of batches of wafers 3″ to 8″, from cassette to cassette or to boat, according to different process: 25 to 25 ; 25/25 to 50 ; 12/13 to 50.
Customized to meet your different cassettes, boats and wafers specifications needs, the COMET 3 STATION is fast, clean, reliable and accurate, and it saves valuable space thanks to its small footprint.
Moreover, the COMET 3 STATION is compatible with SECS-GEM communication, SECSI or HSMS protocol, thanks to its R2S232 and TCP/IP communication port available on the rear side of the machine.
Benefit
- Small footprint
- Batch wafer transfer system from cassette to cassette or to boat
- Wafer size 3″ to 8″
- Customized according to customer cassettes/ boat and wafers
- Open frame, designed for a vertical laminar flow
- Fast, clean, reliable and accurate
Options
- Notch or Flat aligner
- Back to Back function
- Automatic BCR and RFID
- SECS / GEM Communication
- Selectable Notch / Flat position button
- Tower light
- ESD: Electrostatic dissipation
Software
- Friendly and intuitive
- Adjustable parameters
- Historical data recorded
CE CERTIFICATION
SEMI STANDARD
CLASS 1
Performance
UPTIME: 99.8%
MTBF: > 4000 HOURS
MTTR: < 1 HOUR
MTBA: 750 HOURS
CYCLE TIME: < 1MN without alignment
< 1MN30 with alignment
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