By R2D (Italy and UK only)
Supplier Info
Product Type:
Equipment
Application:
Wafer Handling
Product Description:
Using the COMET 2 STATION is the easiest way to transfer a batch of wafers 3″ to 12″, from cassette to cassette or from cassette to boat. The batch can contain from 1 to 25 wafers to be transferred.
Customized to meet your different cassettes, boats and wafers specifications needs, the COMET 2 STATION is fast, clean, reliable and accurate, and it saves valuable space thanks to its small footprint.
Moreover, the COMET 2 STATION is also compatible with SECS-GEM communication, SECSI or HSMS protocol, thanks to its R2S232 and TCP/IP communication port available on the rear side of the machine.
Benefit
- Small footprint
- Batch wafer transfer system
- Cassette to cassette transfer or Cassette to boat
- Wafer size 3″ to 12″
- Customized according to customer cassettes and wafers
- Open frame, designed for a vertical laminar flow
- Fast, clean, reliable and accurate
Options
- Notch or Flat aligner
- Back to Back function
- Automatic BCR and RFID
- SECS / GEM Communication
- Selectable Notch / Flat position button
- Tower light
- ESD: Electrostatic dissipation
Software
- Friendly and intuitive
- Adjustable parameters
- Historical data recorded
CE CERTIFICATION
SEMI STANDARD
CLASS 1
Performance
UPTIME: 99.8%
MTBF: > 4000 HOURS
MTTR: < 1 HOUR
MTBA: 750 HOURS
CYCLE TIME: < 1MN without alignment
< 1MN30 with alignment
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