By R2D (Italy and UK only)
Supplier Info
Product Type:
Equipment
Application:
Wafer Handling
Product Description:
The Table Top Organizer is a single wafer pick & drop machine, transferring wafers within or between cassettes.
Customized according customer cassettes and wafers, the Table Top Organizer can handle 6″ and 8″ wafers on the same machine (automatic size detection), and is compatible with thin wafer up to 150µm on 6″, 180 on 8″, from various substrate materials.
Moreover, the Table Top Organizer is compatible with SECS-GEM communication, thanks to its Ethernet communication port available on the rear side of the machine.
Benefit
- Compatible 6″ and 8″ (same machine)
- Compatible thin wafer up to 180µm on 8″, 150 on 6″ Wafer size 3″ to 8″
- End effector: Backside vacuum or edge contact
- Preprogrammed factory recipes (Randomization, compacting, copy and invert)
- Manual transfer (single wafer transfer)
- Customized according to customer cassettes and wafers
Options
- Automatic BCR and RFID or bar code gun
- SECS / GEM Communication
Software
- Friendly and intuitive
- Standard or customizable
- Access level with passwords
- Wafer Recoveries
- Easy integration with other systems by SECSII-GEM, ASCII, RS, TCPIP
CE CERTIFICATION
SEMI STANDARD
CLASS 1
Performance
UPTIME: 99.8%
MTBF: > 4000 HOURS
MTTR: < 1 HOUR
Throughput: From 350 WPH (thin wafers to 600 WPH (standard wafer)
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