Last year S3 Alliance installed and grounded a Wafer Transfer Unit from Mactronix to a Manufacturer of electronic devices in Germany. The Maintenance Engineer said:
“Our PVA-TePla Wafer Transfer Units from Mactronix showed increased static load during transfer of ~3KV as measured. The solution offered by Mactronix was to replace the original Ultem combs with new, ESD-compatible PEEK ones. After installing and grounding them (S3-Alliance service available), the measured static load was reduced to <50V!
This solution is simple and very efficient and because the new comb’s pricing is similar to the original combs, also the most price-worthy option to get rid of ESD problems with batch transfer systems in general.”