Author: S3 Admin

SONOTEC® and S3 Alliance agree on distribution partnership

With a non-contact handshake, the two managing directors Michael Münch and Thomas Riedel have sealed the partnership between SONOTEC GmbH from Halle (Saale) and S3 Alliance GmbH from Kirchentellinsfurt. The application specialist for process equipment, metrology, and handling is from now on taking over the Europe-wide sales and service for flow measurement technologies and air bubble detectors of SONOTEC® in the semiconductor and micro-electronics industry.

SONOTEC® holds a world leading position in ultrasonic-based technologies for liquid flow monitoring on flexible and rigid tube systems. Non-contact flow meters and bubble detectors can monitor and control liquid flow processes without any risk of leakage or contamination and without causing any downtime of machinery. Therefore, SONOTEC’s contactless measurement technology has proven ideal for sensitive semiconductor processes in which a number of abrasive, adhesive, corrosive, and high-purity liquids are applied.

S3 Alliance is a market driven organization with more than 20 years of experience in the field of distribution, service, and project management bringing manufacturers of highly specialized capital goods and consumables into Semiconductor, Green Energy, Life Sciences and related market segments.

“The cooperation brings together the strengths of two companies that are perfectly complementing each other. This opens up the opportunity to significantly yield market synergies for a successful operation in the European semiconductor industry”, emphasizes Michael Münch his expectations towards the agreement.

“We are very happy to collaborate with a German high-tech sensor company that is already successful in other industries. SONOTEC® products fit perfectly into the S3 Alliance portfolio that has strengths in CMP and wet chemical processing applications. Using accurate contactless technology enables easy and safe integration, with the possibility to control more accurately demanding semiconductor applications, which is required by the market. We will support SONOTEC® with access to an existing customer base in the industry and are looking forward to develop a strong and successful relationship for the future.”, describes Thomas Riedel the framework and cooperation goals.

With its product development specifically targeted to the semiconductor industry, SONOTEC® benefits substantially from decades of experience in designing non-contact ultrasonic flow sensors for highly sensitive applications in biopharma as well as for medical devices with strict safety regulations.

“Thus, certain sensor performance features such as high accuracy real-time instantaneous flow measurement of up to 400 L/min, the implementation of a volume-totalizer, a broad range of standard industrial interfaces, and the expertise in handling a wide range of tubing properties and geometries could be successfully adopted to the needs of semiconductor applications”, adds Anika Baumhauer, Strategy & Sales Manager for the semiconductor industry.



Foamtec Face Masks for Cleanroom

Foamtec’s cleanroom foam face masks are widely employed as under masks in cleanrooms that use headcovers with built-in face masks.

Foamtec’s Foam face masks are not impacted by recently implemented export or import restrictions, so are a more readily obtained mask for semiconductor, pharmaceutical, aerospace and medical device cleanrooms.

Most importantly, the use of Foamtec’s foam face masks does not take supply away from hospitals and medical clinics treating the Corona Virus.

While foam face masks do not have filtration capabilities against viable particulates, the table below demonstrates the low particle counts vs. three-ply non-woven masks. As an added benefit, foam face masks significantly reduce the fogging of safety glasses, primarily when employed as under mask.


≥ 0.5 um and above


Trial HT4401 3 Ply Mask
1 90 1,567
2 186 1,550
3 168 1,504
Average 148 1,540
Specification < 800 N/A

Caption: The table above highlights the particle release characteristics of Foamtec’s foam face masks vs. 3 Ply Non-woven masks.

Custom Made 8” PEEK Cassette

At the end of 2nd quarter 2019 S3 Alliance supplied a batch of new custom made 8” PEEK Cassette to one of the biggest IC manufacturers in Russia, Mikron. Cassette was produced under the trade mark CKPlas by our Taiwanese partner – Chung King Enterprise Co. Ltd., located in Taoyuan city. Chung King Enterprise is specialized in wide variety of semiconductor wafer and reticle box from various polymeric materials. Cassette has unique design based on the customer requirements. New, improved raw material (PEEK) has been used for manufacturing of this type of cassette.


For more than 40 years, Jabil Precision Automation Solutions (formerly Jabil Chad Automation) has brought leading-edge precision automation solutions to manufacturers around the world. These innovative solutions are born from a group of highly-skilled engineers that combine passion, creativity, and assembly design know-how with hands-on manufacturing and production experience. The result is reliable precision automation solutions tailored to meet your exacting needs.

At Jabil Precision Automation Solutions, our team revels in the opportunity to meet challenges of precision alignment, handling, or assembly processes. Starting with our structured design process and our expert cross-functional engineering team’s knowledge, we can use off-the-shelf robots and assembly systems, or when necessary, design and fabricate components to generate the sub-micron accuracy required to build your next-generation products.”

            We deliver automation solutions to an array of industries worldwide:

  • Mobile Devices
  • Semiconductor
  • AR/VR Devices
  • Solar and Energy Devices
  • Automotive
  • Medical Devices
  • Optical Assembly
  • Wearable Technology


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S3 Alliance installed and grounded a Wafer Transfer Unit from Mactronix

Last year S3 Alliance installed and grounded a Wafer Transfer Unit from Mactronix to a Manufacturer of electronic devices in Germany.  The Maintenance Engineer said: 

“Our PVA-TePla Wafer Transfer Units from Mactronix showed increased static load during transfer of ~3KV as measured. The solution offered by Mactronix was to replace the original Ultem combs with new, ESD-compatible PEEK ones. After installing and grounding them (S3-Alliance service available), the measured static load was reduced to <50V!

This solution is simple and very efficient and because the new comb’s pricing is similar to the original combs, also the most price-worthy option to get rid of ESD problems with batch transfer systems in general.”


New distribution agreement with Dynatex International, California, USA

S3 Alliance signed a new agreement with Dynatex International, Santa Rosa, California, USA.

Dynatex International has been a leading supplier to the Semiconductor Industry since 1958. They are committed to excellence in service and innovation in design and engineering. With over five decades of industry leadership, Dynatex International offers a strong base of technical accomplishment and business expertise to assist you with your specific product requirements.

Dynatex International provide solutions for die/diode dicing and wafer processing applications and solutions designed to increase yields, maximize throughput, and minimize operator intervention.

With over five decades of experience, Dynatex offers a strong base of technical accomplishment and business expertise to assist you with your specific product requirements. Dynatex provides a complete line of die-singulation products for dry dicingsaw dicingwafer bonding, and wafer expanding processes. Dynatex products are designed with the end-user in mind with a focus on robustness and performance.



S3 Alliance, Jabil Chad and Mei Wet Processing had a common booth on Semicon Europe 2019 in Munich.

S3 Alliance, Jabil Chad and Mei Wet Processing had a common booth on Semicon Europe 2019 in Munich. 

Together we had a 60qsm booth in hall B1, booth 1013.  Our two partners and we look back on successful and constructive days at the show in Munich.

Jabil Chad Automation began as Chad Industries, Inc.  Founded in 1973 as a full-service engineering and manufacturing operation, for over 40 years we have designed and produced highly-productive and reliable automation systems that have given our customers the competitive edge in the global marketplace.

Serving Global Semiconductor, MEMS, LED, III-V Compound, and Medical Industries, MEI’s wet processing systems, wet bench platforms and chemical delivery systems provide you with reliable, high-quality solutions for almost every batch immersion or spray wet process application.




Dynatex International has been a leading supplier to the Semiconductor Industry since 1958. They are committed to excellence in service and innovation in design and engineering. With over five decades of industry leadership, Dynatex International offers a strong base of technical accomplishment and business expertise to assist you with your specific product requirements.

Dynatex International provide solutions for die/diode dicing and wafer processing applications and solutions designed to increase yields, maximize throughput, and minimize operator intervention.

With over five decades of experience, Dynatex offers a strong base of technical accomplishment and business expertise to assist you with your specific product requirements. Dynatex provides a complete line of die-singulation products for dry dicingsaw dicingwafer bonding, and wafer expanding processes. Dynatex products are designed with the end-user in mind with a focus on robustness and performance.

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CN1 has become the leading supplier of Atomic Layer Deposition (ALD) equipment through
aggressive investments in R&D.
Their equipment designs and process technologies have been thoroughly proven and perfected over a decade of intensive development.
As a result, high-tech organizations working in the semiconductor, display, bio-tech and advanced energy industries now prefer CN1 ALD systems to meet their most demanding nanotechnology applications and production needs.

The proof is that CN1’s ALD equipment is now in use at hundreds of leading Universities, Research Institutes and Companies in the United States, Japan, Singapore, Taiwan, Russia, China and Korea.

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Dong AH Trade Corp.

Dong AH Trade Corp. develop manufactures, imports and exports the research equipment development for semiconductor, new materials, Nanotechnology and Biotechnology.

Established in 1991, they habe been manufacturing research equipments with related semiconductors for Nanotechnology Biotechnology. They have a business with Samsung, LG and various enterprises research institures, government with related laboratories, and all university’s laboratories in South Korea.

Additionally they export the above research equipments to overseas in the world, we are based on the manufacturing industry that imports semiconductor with related research equipments with know-how in the meantime. Dong AH Trade Corp. is established on accumulated technology and various experiences, and they are constantly working to provide more qualified service, more competitive prices, and  rapid service that is more responsible for the products.

Dong AH Trade Corp. is trying to develop High-precision spin coater (ACE Series, TOP Series) which is highly developed than existing products, the following development of ACE-200 (Up to  6 inches), they have also developed the TOP-8 (Up to 8 inches). High-precision middle size spin coater which is the most popular since the spin coater industry in South Korea.

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Established in 1992, Expertech’s core competency is newly manufactured thermal processing systems with over 50 systems in the field that were designed and fully manufactured by Expertech. In addition, Expertech has an established reputation as a supplier of over 500 remanufactured and refurbished systems originally built by other suppliers. We provide field service, repair parts and upgrades for a wide range of thermal systems manufactured by Expertech and other OEM suppliers.

Originally Expertech mainly supported thermal process applications for the semiconductor industry. Since 1995, Expertech has been adapting systems and making custom designed products to meet needs of the MEMS, photovoltaics, sensors, and optical coatings industries.

Horizontal and Vertical Style Furnace Products

While design and manufacture of horizontal furnace systems have always been a major Expertech product line, the VTR is a key product in the vertical furnace marketplace. Originally developed by Silicon Valley Group, Inc. (SVG), the Vertical Thermal Reactor (VTR) has over 1500 systems shipped to a worldwide installed base. Since 1995 Expertech has provided rebuilt VTR systems, upgrades in the field, as well as parts and service support for VTR systems. More recently, in 2007, Expertech acquired the full rights to all engineering drawings as well as rights to manufacture, modify, and support the VTR product worldwide. From that point forward, we regard the VTR as an Expertech product.

Location and Facilities

  • Located in Northern California’s Silicon Valley, Scotts Valley is between San Jose and Santa Cruz
  • A manufacturing, engineering and office facility with over 40,000 square feet of space
  • Includes an 1,800 square foot cleanroom for gas system manufacturing
  • Over 65,000 square feet of off-site inventory storage space
  • Parts depots located in North America, Europe, and Asia

The Expertech Team

Located at the Expertech factory, we have system engineering, production planning and logistics, assembly and test, marketing, spare parts logistics, field service management, sales management and the business infrastructure to support those functions.

Our senior management has over 100 combined years of industry knowledge.

Expertech’s worldwide sales organization covers all of North America, Europe and Asian technology regions.

Expertech’s field service team, technical support, and parts depots are located in key sites in North America, Europe, and Asia.


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CEK Technology

CEK Technology, formerly Vesta Technology that was International Business Subsidiary of IPS, started as the semiconductor equipments and parts representative in Austin, TX of US from June, 2008. CEK had accessed to all major semiconductor manufacturers worldwide through Sematech & SVTC consortia and relationships for 2008. All staffs having over 20 years semiconductor experience on average including sales, process and equipment engineering for APCVD, PECVD, ALD, RTP, and Diffusion application are fully equipped to handle the challenging requirements facing end users throughout the United States, Europe, and Asia.

CEK Technology, Inc had offered semiconductor processing capability including atomic layer deposition equipment, chemical vapor deposition equipment,  multi-pole inductive coupled plasma etch equipment, and rapid thermal anneal equipment at SVTC Fab2 in Austin, TX. This allowed CEK to provide process demonstration solutions to major semiconductor manufacturing companies. The company is a manufacturer’s representative in US for semiconductor manufacturing components in many fields that help customers save costs without compromising the quality of materials with well experienced partners provides used tool refurbish and regeneration solution from CVD tool through photolithography tool, or can supply turn-key solution by customer request.

CEK Technology provides the both advanced and cost saving parts across a broad range of industries including semiconductor, solar cell, or oil & gas generation industries.


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IV Technologies

Founded in 2002, Zhisheng Technology specializes in the manufacture and sale of polymeric materials for the chemical-mechanical polishing process in the semiconductor and opto-electronic industries. The business philosophy is integrity, innovation, collaboration, service, customer focus and quality stability, caring for the people and growing together with the customers, Vision is positioned as an international, advanced material manufacturer with high added value.


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Tousimis research corporation (formerly Biodynamics Research Corporation) was organized in 1962 under the laws of the District of Columbia. Our company was founded to carry out basic research in areas related to the ultrastructure of matter and to correlate these findings with dynamic experiments. Our goal was, and still is, to develop and perfect instrumentation and products to be used in laboratories where similar studies are carried out. This idea (which has been the basis for our company for the past 41 years) was that of scientific pioneer Dr. A. J. Tousimis, President and CEO of tousimis research corporation.

Today we are pleased to present our listing of research chemicals, supplies, accessories, and instruments for the electron microscopy and analysis laboratory. The majority of items listed were developed in our laboratories where the demand for high quality and reliable instruments continues. We are aware that excellence in research requires not only the well prepared scientist and his organized scientific and technical team, but also the highest quality instrumentation, accessories, and supplies for reproducible and reliable results.

Ultrapure TEM grade products are now available from one source you can trust. We have improved on many of the purification procedures, and even developed our own methods for purifying, packaging, and testing. We are dedicated, and continue to develop and improve our chemical supplies and virtually every item we design and manufacture so that the needs of even the most advanced electron microscopy research laboratory can be met. Our products are the best available and are known for their reliability and highest possible quality so that your experiments are the variables, not your chemicals and instrumentation. For reproducibility, constancy of results, and convenience, join our growing family of customers.


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Wärde Technologies

Warde Tec (Taiwan) Co., LTD. is the first service location in Asia since it was founded in Taiwan. Major business items are design, manufacture and marketing of semiconductors, optoelectronics, solar industry production equipment and spare parts. Because business size is increasing, and personnel, machines and tools are also increasing, with the maturity of technical cultivation, we stationed in a large factory of 18000 square feet in Jubei City, Hsinchu County.

We are specialized in design and manufacture of semiconductor, optoelectronic and solar industry production equipment and spare parts. Combing our abundant experience of design and manufacture with properties of raw material, Warde Tec has become a bridge between technology industry and traditional industry. We fully make use of the advantage of Taiwan’s traditional processing in technology industry and enhance the capability of self-manufacture of Taiwan’s technology industry equipments.


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Shinhan Diamond

Established in 1977, Shinan Diamond Co., Ltd. has been producing high-quality diamond tools for construction and industrial services for 24 years. The members and staff “Dream with Harmony and Creativity” the company motto, to keep up this tradition of excellence. Now, we prepare to Leap into the 21C with the Best and enter a new vision.

We also believe that securing technical power is the only way to survive on today’s fiercely competitive market. We reinvest 5% of our total sales into R&D in order to develop new technology and products. We put our best efforts into customer satisfaction through digital management, global management, and self-management. We have continued to pursue innovation management practices, such as information infra and knowledge information systems. With the execution of these new management forms, Shinhan is improving its economic value and reaching a competitive level in the world market.


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ESI has been in business since 1986 with a focus on serving the semiconductor industry and Gasonic Asher Equipment . From consulting fabs in Europe on device yield improvement to refurbishing AMAT and LAM tools for customers. ESI has broad experience with Plasma Asher, Plasma Resist Strip, and Etch tools. Offering services and technical support in Semiconductor, MEMS, Biomedical, Nanotechnology & LED industries.  We have become the industry leader in remanufactured Gasonics L3510 Asher equipment.

To achieve this, we have been providing unique innovative upgrades and cost-effective technical solutions, high quality equipment and on time spare parts delivery worldwide.  We have maintained a global presence that has grown and expanded into the major high-tech manufacturing areas of the world.


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Labino AB is one of the world‘s leading manufacturers of UV and White Light products as well as Alternative Light Sources. Our mission is to develop lamps based on your needs, to help you create a safer world and to help you see when your eyes are just not enough. Regardless of what application you are using our products for, either to solve crimes or to detect defects on metal by non-destructive testing, or to identify leaks, minerals, bacteria or other fluorescent objects – we have a solution for your needs. At Labino, we are dedicated to UV lights. Labino AB has chosen to stay away from chemicals and similar products and dedicate all its resources and focus into innovating better and better lights. Labino AB runs several product lines such as bench lights, handheld lights, torches, headlights, yoke lights etc with constant improvements and new innovative features being an integral part of the Labino culture. Labino AB is an ISO 9001:2008 certified company.


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Mitsubishi Heavy Industries

We at the MHI Group aim to provide the next generation with an assured future of comfortable lives and happiness through technologies that excite people and our passion for manufacturing. To achieve this aim, we seek to provide further value by improving the technologies we have fostered and using new ideas and concepts to integrate our diverse technologies. From a global perspective, we work to solve the problems facing humankind and to realize everyone’s dreams.

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Will be S&T

Since Willbesnt established in 1987, Willbe have been grown up rapidly as Willbe are specialising in semiconductor and LCD related components, which is based on consistent R&D investment with high Performance industry standard products. As Willbe achieved their first goal in local market, Willbe continuously grew up to develop new technology with dynamic motivation. Willbesnt were ISO9000/14000 certified under the strict management of environment and products guarantee system. At last, Willbesnt will continuously increase the R&D investment to be a global standard company with advanced technology.

Willbesnt have over 20 years of experience in Engineering Plastic Spare Parts & Components, serving  Major customers related in Semiconductor & FPD  in Korea, having long-standing relationship with Customers in Semiconductor, FPD and Solar Industry.

For the Semiconductor Industry, Willbesnt are manufacturing mostly CMP Retaining Ring used on large OEM plattforms like AMAT and EBARA as well as engineering technical Plastic Parts (PEEK, VESPEL, PFA, PTFE, PVDF, PCTFE) for CVD and ETCH equipment.

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Ultrasonic Systems Inc.

Ultrasonic Systems, Inc. (USI) manufactures high-performance spray coating equipment based on patented, nozzle-less ultrasonic spray head technology.

USI’s products deliver a superior alternative to conventional air-atomizing or ultrasonic spray nozzle solutions for the solar, semiconductor, fuel cell, medical, and electronics assembly markets. With thousands of installations across many industries worldwide, our team of technical experts is committed to providing the best technical, product, and application support available.

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Trion Technology

Trion Technology, Inc. is the largest domestic US supplier of custom Plasma Etch and Deposition Equipment for over 20 years. We also have a significant presence in Asia with equipment in Japan, Taiwan, Philippines, China, Malaysia and Singapore.

Trion manufactures a wide variety of systems for the Compound Semiconductor, MEMS, Opto-Electronic and other markets. Our products feature the smallest footprint and lowest cost systems in the industry with proven production reliability. If you wish anything from full-blown production cluster tools to a simple laboratory system, Trion makes it.


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For nearly 35 years, Trebor has served high purity chemical movement markets with a focus on customers, relationships, and product innovation. Our customer is our priority.

We are committed to quality in everything that we do and in all aspects of our organization. Combining feedback from our customers and best practices across multiple industries allows us to incorporate a quality perspective across the business.

Trebor has been an ISO9001 registered facility since 2002 and continues to improve its system and strives to exceed the requirements of both the ISO standard as well as the needs of our customers. In 2001, Trebor embarked on the implementation of Lean/Six Sigma practices and continues to date to embraces these processes.

Trebor is a data driven organization that quickly but methodically drives to implement and maintain opportunities for improvement through the use of Root Cause Analysis, Value Stream Mapping, and Voice of Customer research. By working closely with both our customers and suppliers, we have a better understanding of the opportunities allowing us to drive toward implementation faster and without misused resources.


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Tango Systems

Based in the heart of Silicon Valley, Tango Systems, Inc. is a leading innovator in high performance, cost-effective PVD systems. The Axcela™ 450 platform is the first in a new line of Cluster tools, based on the highly successful Axcela™ 200/300 platforms that are currently used in high-volume production all across the globe.

Over the last decade, Tango’s flexible Axcela™ 200/300 series has supplied tools for manufacturing in the Advanced Packaging, Hard Disk Drive (both Magnetic and non-Magnetic films), Ultra-thin films, Interposers and TSV markets, all with the industry’s lowest Cost of Ownership. The unique Small-Batch-Cluster architecture, coupled with the patent protected D-Source magnetron technology and unique ICP clean configuration made the Axcela™ 200/300 series tools the most flexible, reliable, and cost-effective systems in their class, capable of depositing anywhere from 10 angstroms to 10 microns with ease.


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Standard Technology Corp.

In the ever-changing and fast-paced world of technology, we are the important link between customers ‘needs and satisfaction improvement for equipment & parts manufacturers by providing our solutions. Since 1988‚ we have established our partnership globally. In recent years‚ we have devoted much of our resource and energy in developing new business to full leading applications and helped our customers to be successful players in the market. “Integrity, Profession‚ Innovation” has been carried out continuously to strengthen our core values. With our ideal values which have leaded us a successful beginning in Taiwan and China, we will keep increasing our worldwide presence.


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Sinmat is recognized as the leader in development of novel processes that enable chip and other manufacturers to develop more efficient devices and related products. It is singularly focused on providing its customers with customized planarization technologies that are critical in the manufacturing of computer chips, LEDs and power devices. Sinmat’s planarization technologies also enable manufacturing of advanced substrate materials, used in military and other critical sectors of the economy.

The company’s planarization technologies are based on several proprietary chemical mechanical planarization (CMP) processes. Used widely in semiconductor advanced materials, Sinmat’s CMP technology are enabled by its unique polishing slurries – an unique mix of nanoparticles and chemicals that smooth out rough topography and create defect free surfaces in a rapid reliable and cost effective manner – part of a rapidly growing $20B market.

Sinmat works interactively with customers to develop CMP processes customized for their applications. Employing a very robust R&D portfolio, Sinmat is pioneering the future of several new products based on novel CMP technologies.

Browse all Sinmat equipment on the S3 Alliance website

R2D Automation

R2D Automation has over 20 years of experience in wafer handling automation. In 1992 the company created the Comet batch wafer transfer tool, a new type of first class stand alone batch wafer transfer system for Semiconductor industry. Early 2000 R2D Automation designed the first single wafer transfer system and developed a new line of 300mm batch transfer systems using a fully automated homemade Scara robot. In parallel to the semiconductor activities R2D started designing batch wafer transfer systems for the Solar Industry.

Today, R2D Automation is a global supplier of Solar and Semiconductor automation equipment with a 35% global market share for Solar diffusion furnaces.


In 2006 R2D Automation successfully delivered the first automation systems to be combined with Tempress diffusion furnace (Alix automation). One year later R2D was acquired by the parent company of Tempress (Amtech Systems Inc.) to create an unique integrated solution to its customer base. Since then R2D has provided over 400 diffusion automation systems to the solar industry, making it market leader in this segment. In 2014 a new generation of batch wafer transfer systems was introduced to be integrated with the Tempress 5 tube furnace platform. In this new automation wafers can be transferred from cassette to longboat in single slot and back to back positioning, at full and half pitch spacing.


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PTB Sales

PTB Sales was established in 1995 and is a leading North American provider of Refurbished Vacuum Pumps and  Vacuum Pump Repair services to the Semiconductor Fabrication, PV Solar, Nano-Technology, MEMS, Vacuum Coating, Aerospace and Defense, Research and Development and General Industrial industries. Founded on our guiding principle of “What YOU need, when YOU need it!” SM we have established a track record of being there when our customers need support in a timely manner and at a reasonable Price.

Based in Azusa, CA we provide Equipment Refurbishement and Sales, Repairs and Exchanges, Vacuum Chamber Design and Manufacture and the new GreenChipSM Service Programs across a variety of critical components such as cryogenic vacuum pumps, turbo molecular vacuum pumps, roughing pumps, power generators and related electronics, valves and others. Because of our commitment to quality and superior customer relations, the portfolio of products we serve continues to expand.

PTB operates multiple remanufacturing lines out of 3 facilities with a combined capacity of 35,000 sq ft, which also store a very significant inventory stock. We have a highly technical competent staff that is focused on customer service and getting it right the first time. Because of this we are the largest provider of Rebuilt Vacuum Pumps and Vacuum Pump Repair Services in the Los Angeles area.

We have an extensive and growing network of partners throughout the supply chain and have solid relationships with many equipment OEMs. As a result we can deliver vacuum pump repair service to our customers that are equivalent to those they could receive from an OEM but at a much more affordable price level. Almost two decades after being founded our focus remains on reliable, timely and high quality servicing of our customers needs! In addition, these strategic relationships allow us to sell NEW Vacuum Pumps at market competitve rates.


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Power+Energy is leading the way to a hydrogen powered future with hydrogen separation, analysis and generation products based on its unique patented hydrogen technologies and its proprietary low cost automated manufacturing processes.

Our Mission

  • Provide accurate, low-cost, dependable Hydrogen Gas Analysis
  • Deliver high-purity Hydrogen for Fuel Cell Applications
  • Generate low cost Hydrogen from fossil, alternative and renewable fuels

With Power+Energy’s patented membrane separation technology, syngas generated from fuels such as natural gas, methanol, gasoline, diesel, propane, and ethanol can be converted into a stream of pure hydrogen gas with less than 1 parts per billion of carbon monoxide and sulfur, meeting the highest purity standards for powering a Proton Exchange Membrane (PEM) fuel cell.

Power+Energy’s novel Hydrogen Elimination Measurement System (HEMS) technology enables the analysis of all impurities in a hydrogen in real time in a single instrument. HEMS can be used to qualify H2 fuel to the SAEJ2719 purity specification providing confidence to fuel suppliers, fuel station operators, regulators and consumers that their hydrogen fuel meets the purity specification required to ensure long life for the vehicle fuel cell.

For the semiconductor and LED industries, HEMS can detect part-per-trillion (ppt) levels of all critical impurities helping manufacturers to ensure that their hydrogen and hydrogen gas systems are sufficiently clean to produce high device yields.


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NPMT is a wholly owned subsidiary of NPM Group in Japan which was founded in 1952. NPMT is responsible for the research and design, production, and marketing NDS, a global brand of NPM Dicing System. We are committed to our core mission, totally dicing, which aims to provide our customers a full range of dicing products including dicing saws, dicing blades, dicing tapes, chuck tables and other dicing accessories. We also manufacture grinding wheels for wafer thinning sequence. NPMT extend our commitment even further by striving for offering quicker and better service supports with our dicing centers in Japan, Taiwan and China.

The commitment to customer satisfaction and timely customer support is our company’s motto.

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MicroSense, LLC

MicroSense, LLC, previously known as ADE Technologies, is comprised of three primary businesses – precision capacitive sensors, vibrating sample magnetometers and magneto-optical Kerr effect (MOKE)tools for state-of-the-art magnetic measurement and wafer measurment systems. Until the company was sold in November, 2009, we were a subsidiary of KLA-Tencor Corporation, a leading global supplier of semiconductor wafer defect inspection and metrology tools.  MicroSense serves a host of industries including semiconductor equipment, data storage, machine tool, solar, automotive and high brightness LED. MicroSense provides customer value and security, through extensive business experience, financial strength, world-wide support, and technical Leadership.

Pioneering High Resolution Measurement with Capacitive Sensors

Founded in 1967 by Robert C. Abbe, our capacitive sensor business was originally a part of ADE Corporation. ADE Corporation was renowned for its visionary and novel approaches to high resolution, non-contact measurement for demanding dimensional gaging applications.  Over time, ADE grew to become the world’s leading supplier of tools for bare semiconductor wafer measurement. High resolution capacitive sensors for position and displacement measurement (also known as “cap gages”) became synonymous with “ADE” and our trademarked name, “MicroSense”.

MicroSense provides capacitive sensors and OEM metrology modules, based on patented capacitive sensing technology, to make very precise, high bandwidth measurements of precision products such as solar wafers, sapphire wafers, hard disk drive motors, air bearing spindles, precision X-Y stages, optical disks, automotive parts and machine tools. Our capacitive displacement sensors provide the highest resolution in the industry, less than 0.05 nanometers, exceptional stability and virtually unlimited service life.

Innovative Tools for Wafer Dimensional Measurement

MicroSense offers high-sensitivity wafer measurement tools for characterizing sapphire, silicon carbide and various types of semiconductor wafers. MicroSense acquired SigmaTech, Inc. of Tempe, Arizona in June, 2012.  With this acquisition, MicroSense added leading-edge wafer inspection tools to its portfolio of innovative metrology solutions. SigmaTech systems integrate multiple sensing technologies such as optical spectrometry, interferometry and SigmaTech’s patented auto-positioning back pressure (APBP) Technology.


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MEI Wet Processing

Serving Global Semiconductor, MEMS, LED, III-V Compound, and Medical Industries

MEI’s wet processing systems, wet bench platforms and chemical delivery systems provide you with  reliable, high-quality solutions for almost every batch immersion or spray wet process application. Field-proven with high performance, MEI’s wet bench is custom tailored to your meet all  processes requirements.  All MEI systems feature IDX Flexware Process Control software allowing you complete control, monitoring, and data acquisition of your entire application process.

With  the many advanced features, available options  and  award-winning support MEI’s wet bench is your Wet Processing solution for all your applications.   Depending on the platform MEI offers optional megasonic and ultrasonic process tanks, conductivity and resistivity monitoring, multi-axis robots, a variety of materials choices, exhaust flow modeling, ergonomics and safety features.

We specialize in fully-automated wet processing solutions, providing Dry In /Dry Out processes with some of the smallest footprints available in the industry. Through our innovative technology, superior design, quality craftsmanship, and award-winning technical support MEI offers a commitment to their customer like no other manufacture in the industry.

A Wet Bench that’s Built on Commitment


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LEVITRONIX is the worldwide leader in magnetically levitated Bearingless Motor technology, specializing in supplying medical blood pumps to the medical community and ultra-pure fluid handling devices for Microelectronics, Life Science and Industrial applications.

Our patented technology permits the motor and magnetic bearing to be combined into a single unit with products that achieve maximum reliability, long life, and the ability to pump precious fluids in the harshest of environments.

LEVITRONIX offers the ideal solution for those applications that demand contaminant-free pumping, mixing or fluid control for extended periods in a highly reliable fashion.


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Founded in 2006, Greenspec Inc. is a leading supplier of service & technology providers in semiconductor, flat panel display and mobile industries mainly.

The company is strongly developing new products aswell as precious alliance upcoming mobile and common industries.

Greenspec Inc. is committed to build long term strategic relationships which add significant value of customers. In addition, the company develops the leading edge products to the customer continuosly.

And the company offers to distinguish solutions so that customers can improve new manufacture and yield on high density device, high technologies and the cost efficiency.

“Our slogan and mottos” is to be recognized by customers as the best and the most respected equipment, part and service supplier with a proven track record of distinguish technology, clean environment and mutual trust.

An ISO 9001/14001 certified company, Greenspec Inc. is located in Korea. The company maintains engineering and manufacturing facilities in the location and partners around the world to support global customers.

We are always there where customers are!!!


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Founded in 1999, G&P Technology, as the name Grinding & Polishing implies, has dedicated its resources and efforts to providing Universities, R&D Organizations, & MEMS companies with precise and affordable CMP (Chemical Mechanical Polishing) systems and services.

G&P Technology works with CMP laboratories in Asia, Europe and US including many CMP labs in universities and MEM’s R&D fabs. G&P Technologies also offers consulting and evaluation services for consumables manufacturers to improve and develop their products for CMP applications.

G&P Technology also performs government and private research projects, system development for next generation processes and special applications development is provided for the university and R&D community.
More than 100 systems have been installed for research and development in the world.

Recently an integrated system with 12 inch POLI-762 and Cleaner-812L, post CMP cleaning system has been broadly used in R&D and semi-production line.

G&P Technology would like to continue to provide user friendly intelligent systems in the field of CMP.


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Foamtec’s mission is to enable contamination control professionals to improve particle control in clean rooms by solving surface contamination challenges. The Wilshire Contamination Control Division of Foamtec International supplies clean room mops, foam swabs, microfiber swabs, foam wipers, microfiber wipers, UltraSOLV® ScrubPADS to address clean room cleaning and the critical cleaning of process equipment.

The Wilshire Contamination Control Division of Foamtec International has a proven track record of solving difficult contamination control problems:

      • In the semiconductor industry equipment engineers face particle contamination and equipment downtime issues in wafer processing equipment. The use of flammable, hazardous solvents associated with equipment PM’s. High Vacuum chambers in wafer facilities can be cleaned with DI water rather than IPA.
      • The Pharmaceutical industry faces facility appearance and contamination risks related to the inability of current cleaning and disinfection SOP’s to control residues, rust and rouge.
      • Fiber and particulate contamination is the leading cause of inspection, re-work and defects at Medical device manufacturing facilities. Manufacturing engineers employ our industry leading foam wipers and microfiber wipers to improve contamination control in implantable medical device production facilities.

Behind our innovations stands ISO vertically integrated manufacturing facilities that allow us to deliver quality and consistency to our valued customers.


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