HVTM/GVTM Series Pad

Product Type:

Parts & Consumables

Application:

CMP Verbrauchsmaterial

Product Description:

IV Technologies has been concentrating on developing CMP consumables for over 20 years. They offer CMP Hard pad, Soft pad, Membrane and Parts with more than 100 global issued and pending patents.

PU Polyurethan Pad for multiple Applications:

Advantages

HV series: High RR / Long life time / Low defectivity

GV series: High PE / Reliability / Low defectivity

Core Technology

Our pad utilizes proprietary polyurethane formulation & synthetic technology, molding Process, polymer elastomer, CNC machine tool precision processing and laminating technology.

PU/Elastomer Technology

Material Formulation

iVT pad/membrane are made from exclusive PU/elastomer formulation & synthetic technology. Molecular configuration can be optimized to various polishing requirements.

Innovative Processing

iVT pad provide better PtP quality control with single pad manufacturing. Real time QC items can make sure quality & stability of pad/membrane.

Structure & Performance

Physical properties of iVT pad can be controlled & adjusted in specific range. General pore size is uniform & pore structure can be arbitrarily made to close/open pore.

CNC for Various Grooving Design

Groove Design

The grooving pattern of iVT pads are presented by exclusive design, which are reliable for IP concerning, through various CNC skills. Complex and novel grooving types like C-groove and radial spiral can be accomplished, and the grooving details can also be customized.

Dimensional stability

The CNC tools applied on iVT pad have precise dimension. All tools are examined by QC items regularly. Therefore, the relative grooving dimension of pad can offer steady performance in CMP serving.

Customization

iVT CMP pad design is highly customizable to meet different customer’s technology challenges and needs.