ScrubWRIGHT Pen Tool and ScrubBELTS

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Supplier Info

Product Type:

Parts & Consumables


Cleaning Accessories

Product Description:

A unique tool for cleaning small, hard to reach area such as VAT valves and electrostatic chucks (ESCs).

Interchangeable belt-shaped Diamond ScrubBELTS® in various grits (280 to 1350) create a versatile instrument perfect for polishing stains, scratches and process-induced residue from scratch sensitive surfaces. The ScrubWRIGHT® is Spring adjustable for easy mounting and rotation of the ScrubBELTS®.

  • Improved Cost of Ownership. Enables in-chamber cleaning of parts and eliminates Downtime and High Cost associated with removing and sending parts out for cleaning.
  • Helps Reduce Particles. Effectively removes deposition from areas Critical to Process (Edge of ESC, Beam Defining Apertures…) to prevent unwanted flaking.
  • Safely Removes Deposition from Sensitive Areas. Use Diamond ScrubBELT® directly onto a small area of deposition, preventing excess wear in surrounding areas.
  • Reduces Damage to Critical Parts. Eliminates having to use Scotch-Brite™, razor blades and ceramic knives.
  • Wide Selection of Diamond ScrubBELTS®. Allows for quick removal of deposition from aluminum, stainless steel, ceramic, glass, quartz and anodized surfaces.


ScrubWright PEN
FTPEN-1, Size: 165mm x 13mm x 10mm, Belt Size: 6mm
Material: High Impact Plastic w/Spring Tensioned Belt Attachment Mechanism, Diamond Grit: 280 to 1350

Available in grits 280, 360, 800, 1350

Please check the Downloads Section for more information and other chamber cleaning tools.

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  • cleaning of O-Ring grooves and other hard to reach areas such as deposition chambers
  • cleaning of VAT valves during PM
  • cleaning of heavy deposition build-up areas
  • cleaning of areas where low particle emissions are required

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