Veritas-Series (Big Chamber SEM)

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By EMCrafts

Supplier Info

Product Type:

Metrology & Handling


Application:

Scanning Electron Microscope


Product Description:

  • High Performance and Productivity
  • Large Scale Stage Movement (X / Y : 120mm)
VERITAS-3000 / 3100 (Motorized Stage)
  • Overview
  • Specification
  • Application
  • Cube-Series
  • Genesis-Series
  • 1. Simple and Intuitive User Interface for Everyone
    2. Wide range specimen observation & Non-destructive large specimen analysis
    3. X 10 ~ X 300,000 Magnification
    4. Automatic Functions To Minimize Repetitive
    – Auto Focus, Auto Brightness & Contrast,
    Auto Gun Alignment, Auto Saturation
    5. High Resolution Imaging
    – Veritas-3000 : 3nm SE Image (SE Detector)
    – Veritas-3100 : 3nm SE Image (SE Detector) /
    4nm (BSE Image)
    6. Able to analyze specimen within 3 minutes after
    loading specimen
  • 7. Vacuum Mode
    – Veritas-3000 : High Vacuum only (<9 x 10-3Pa)
    – Veritas-3100 : Variable Pressure(10 ~ 230Pa)
    8. Detector
    – Veritas-3000 : SE(ET Type)
    – Veritas-3100 : SE(ET Type) / BSE(4Channel, Semiconductor)
    9. Independent product development, Quick & Prompt  AS
    10. Various kinds of specimens can be analyzable with optional
    detectors
    – 4Channel BSEEDSEBSDWDSCL
    Raman SpectroscopyLaB6 / Cebix Upgrade
    E-beam Lithography3D ImagingChamber Camera
  • 11. 5-Axis Large scale motorized stage
    – Internal dimensions : 230(W) x 210(D) x 260(H) mm
    – Maximum Sample Size : 210mm(H), 65mm(V)
    – Maximum Sample Weight : 2kg
    – Wide Movement Range : X,Y : 120mmZ : 5~65mmT : -20° ~ 90°R : 360°
  • Analyzable Specimens
  • 1. Large Sample Analysis
    Veritas-Series can analyze large sample which were unable to do with Genesis- Series. ex) Wafer, Disk

2. Non-destructive Sample Analysis
Able to analyze sample without cutting.
ex) PCB, Semiconductor pattern Analysis

3. Heavy Sample Analysis
Able to analyze heavy sample up to 2kg
ex) Rock, Iron Ore


VERITAS-Series specification
Model Veritas-3000 Veritas-3100
Stage Type 5-axis Motorized
– X,Y : 120mm(-60mm ~ 60mm)– Z : 5 ~ 65mm– T : -20° ~ 90°– R : 360°
Vacuum Mode X O
Vacuum Mode High Vacuum Mode (<9×10-3Pa) High Vacuum Mode (<9×10-3Pa)
Low Vacuum Mode(10 ~ 230Pa)
Vacuum System Fully Automated Evacuation System
– Turbo molecular pump (Vacuum ready within 3 minutes)
– Rotary vane pump
– Electrical valve system
Electron Gun Pre-centered Tungsten Filament
Detector SE Detector SE Detector
BSE Detector (4channel, Semiconductor)
Resolution 3.0nm (SE Image at 30kV) 3.0nm (SE Image)
5.0nm (BSE Image)
Magnification x10 ~ x300,000
Acceleration Voltage 200V ~ 30kV
Objective IRIS 20 / 20 / 50 / 100μm (Variable aperture)
Image Shift 100μm
Maximum Sample Size Horizontal : 210mmVertical : 65mm
Advanced Scan Mode Dynamic FocusPoint & Line ScanTilt Compensation
Working Distance 0 ~ 65mm
Automatic Function Auto Brightness & ContrastAuto FocusAuto Gun AlignmentAuto Saturation
Auto FilamentBias
Image Format JPGTIFFBMPPNG
Display Mode Focus Mode : 320 x 240 pixel, Resizable
Preview Mode : 800 x 600
Slow Mode : Applicable to both preview and focus mode
Photo Mode : Up to 3200 x 2400
Dimension(mm) Installation Dimension : 2000 (W) x 800 (D)
– Main System : 800 (W) x 825 (D) x 1500 (H), 200kg
– Rotary Pump : 454 (W) x 134 (D) x 212 (H), 22kg
Supplied Accessories Factory-centered Filament Cartridge 1box(10units)Specimen Mounts 1box(10units), TweezerCarbon TapeHex. Driver 0.89mm (1 ea.)Hex. T Wrench 2.5mm (2 ea.)
Operation Device(PC) Windows 10-based All-in-One 21.5” Workstation100% controlled by keyboard and mouse
Optional Devices Chamber CameraLaB6/Ceb6 upgrade 3D ImagingRaman Spectroscopy
EDS(Energy Dispersive Spectroscopy)EBSD(Electron Back Scattered Diffraction)
WDS(Wavelength Dispersive Spectroscopy)CL(Cathodoluminescence) Image
E-beam Lithography
Power Supply Single Phase : 100 ~ 240VAC, 50 / 60Hz, 1kVA

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SEM is widely used across various fields to produce unprecedented images of the microscopic and nanometric world.
Our family of SEM models are widely-used in research fields and industry applications such as semiconductor,
flat-panel display, and nanotechnology labs .

  • Quality control of electronics circuits and semiconductor parts
  • Observation of microstructure of Secondary cell, CNT (Carbon Nano Tube), Solar Cell, Wafer, Bonding Wire, LED,
    Nano tech


Product Enquiry Form