By EMCrafts
Supplier InfoProduct Type:
Metrology & Handling
Application:
Scanning Electron Microscope
Product Description:
- High Performance and Productivity
- Large Scale Stage Movement (X / Y : 120mm)
- Overview
- Specification
- Application
- Cube-Series
- Genesis-Series
- 1. Simple and Intuitive User Interface for Everyone
2. Wide range specimen observation & Non-destructive large specimen analysis
3. X 10 ~ X 300,000 Magnification
4. Automatic Functions To Minimize Repetitive
– Auto Focus, Auto Brightness & Contrast,
Auto Gun Alignment, Auto Saturation
5. High Resolution Imaging
– Veritas-3000 : 3nm SE Image (SE Detector)
– Veritas-3100 : 3nm SE Image (SE Detector) /
4nm (BSE Image)
6. Able to analyze specimen within 3 minutes after
loading specimen - 7. Vacuum Mode
– Veritas-3000 : High Vacuum only (<9 x 10-3Pa)
– Veritas-3100 : Variable Pressure(10 ~ 230Pa)
8. Detector
– Veritas-3000 : SE(ET Type)
– Veritas-3100 : SE(ET Type) / BSE(4Channel, Semiconductor)
9. Independent product development, Quick & Prompt AS
10. Various kinds of specimens can be analyzable with optional
detectors
– 4Channel BSEEDS
EBSD
WDS
CL
Raman SpectroscopyLaB6 / Cebix Upgrade
E-beam Lithography3D Imaging
Chamber Camera
- 11. 5-Axis Large scale motorized stage
– Internal dimensions : 230(W) x 210(D) x 260(H) mm
– Maximum Sample Size : 210mm(H), 65mm(V)
– Maximum Sample Weight : 2kg
– Wide Movement Range : X,Y : 120mmZ : 5~65mm
T : -20° ~ 90°
R : 360°
- Analyzable Specimens
- 1. Large Sample Analysis
Veritas-Series can analyze large sample which were unable to do with Genesis- Series. ex) Wafer, Disk
2. Non-destructive Sample Analysis
Able to analyze sample without cutting.
ex) PCB, Semiconductor pattern Analysis
3. Heavy Sample Analysis
Able to analyze heavy sample up to 2kg
ex) Rock, Iron Ore
Model | Veritas-3000 | Veritas-3100 | |||
Stage Type | 5-axis Motorized – X,Y : 120mm(-60mm ~ 60mm) ![]() ![]() ![]() |
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Vacuum Mode | X | O | |||
Vacuum Mode | High Vacuum Mode (<9×10-3Pa) | High Vacuum Mode (<9×10-3Pa) Low Vacuum Mode(10 ~ 230Pa) |
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Vacuum System | Fully Automated Evacuation System – Turbo molecular pump (Vacuum ready within 3 minutes) – Rotary vane pump – Electrical valve system |
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Electron Gun | Pre-centered Tungsten Filament | ||||
Detector | SE Detector | SE Detector![]() BSE Detector (4channel, Semiconductor) |
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Resolution | 3.0nm (SE Image at 30kV) | 3.0nm (SE Image) 5.0nm (BSE Image) |
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Magnification | x10 ~ x300,000 | ||||
Acceleration Voltage | 200V ~ 30kV | ||||
Objective IRIS | 20 / 20 / 50 / 100μm (Variable aperture) | ||||
Image Shift | 100μm | ||||
Maximum Sample Size | Horizontal : 210mm![]() |
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Advanced Scan Mode | Dynamic Focus![]() ![]() |
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Working Distance | 0 ~ 65mm | ||||
Automatic Function | Auto Brightness & Contrast![]() ![]() ![]() ![]() Auto Filament ![]() |
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Image Format | JPG![]() ![]() ![]() |
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Display Mode | Focus Mode : 320 x 240 pixel, Resizable Preview Mode : 800 x 600 Slow Mode : Applicable to both preview and focus mode Photo Mode : Up to 3200 x 2400 |
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Dimension(mm) | Installation Dimension : 2000 (W) x 800 (D) – Main System : 800 (W) x 825 (D) x 1500 (H), 200kg – Rotary Pump : 454 (W) x 134 (D) x 212 (H), 22kg |
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Supplied Accessories | Factory-centered Filament Cartridge 1box(10units)![]() ![]() ![]() ![]() |
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Operation Device(PC) | Windows 10-based All-in-One 21.5” Workstation![]() |
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Optional Devices | Chamber Camera![]() ![]() ![]() EDS(Energy Dispersive Spectroscopy) ![]() ![]() WDS(Wavelength Dispersive Spectroscopy) ![]() ![]() E-beam Lithography |
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Power Supply | Single Phase : 100 ~ 240VAC, 50 / 60Hz, 1kVA |
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SEM has become an indispensable solution for natural resource companies to analyze, measure, extract and refine relevant features in rocks, minerals and man-made materials.
Our model of SEM is used in numerous applications, such as in the mining and geoscience industries.