Atomic Classic

Product Enquiry

Product Enquiry Form

By CN1

Supplier Info

Product Type:

Equipment


Application:

ALD


Product Description:

Available from 4“ to 8“ wafer

  • Substrate Size : 4 ~ 8” Standard (Wafer)
  • Thermal ALD Process
  • Laminar Gas Flow (Side Gas Flow)
  • Gas Delivery System : Bubbler, LDS etc.
  • Low Particle Generation
  • Small Volume for Process
  • Available Laminated & Mixed Process
  • Easy User Interface & Maintenance
  • Max Temperature : 450 ℃ (@ Wafer)
  • No. of Precursor Canisters : Up to 4 Sets (Standard)


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Product Enquiry Form