PFA Wafer Cassette

Product Enquiry

Product Enquiry Form

Product Type:

Parts & Consumables


Application:

Handling, Wafer Cassette


Product Description:

PFA Cassette / Teflon Cassette of wafer can be customized and designed by customers’ request, able to resist strong acid, strong hydrofluoric acid, strong base and heat up to 200~220℃, use to deliver wafers in acid & base process of Fabrication factory.


CK2-25-PFA

  • Product name:2″ Teflon Cassette / PFA Cassette
  • Dimension:142.1(L)*67.08(W)*59(H)mm
  • Weight:194.5g
  • Capacity:25 PCS (Beans)
  • Wafer size:2 inch (Ø50mm) Thickness 0.5mm~0.7mm
  • Material:Teflon / PFA
  • Slot Pitch:4.76mm

CK2.5-25-PFA

  • Product name:2.5″ Teflon Cassette / PFA Cassette
  • Dimension:142(L) x 79(W) x 73(H)mm
  • Weight:231g
  • Capacity:25 PCS
  • Wafer size:2.5 inch
  • Material:Teflon / PFA

CK3-25-PFA

  • Product name:3″ Teflon Cassette / PFA Cassette
  • Dimension:142.49(L) x 94.36(W) x 82.53(H)mm
  • Weight:354.5g
  • Capacity:25 PCS
  • Wafer size:3 inch (Ø75mm)
  • Material:Teflon / PFA

CK4-25-PFA

  • Product name:4″ Teflon Cassette / PFA Cassette
  • Dimension:125(L)*140(W)*113(H)mm
  • Weight:571g
  • Capacity:25 PCS
  • Wafer size:4 inch (Ø100mm)  Thickness 0.5mm~0.7mm
  • Material:Teflon / PFA
  • Slot Pitch:4.76mm

CK4-25-PFA (Hollow)

  • Product name:4″ Teflon Cassette / PFA Cassette (hollow)
  • Dimension:125(L)*140(W)*113(H)mm
  • Weight:429.5g
  • Capacity:25 PCS
  • Wafer size:4 inch (Ø100mm), Thickness 0.5mm~0.7mm
  • Material:Teflon / PFA
  • Slot Pitch:4.76mm

CK5-25-PFA

  • Product name:5″ Teflon Cassette / PFA Cassette
  • Dimension:152.4(W)*142.88(L)*146.05(H)mm
  • Weight:607.4g
  • Capacity:25 PCS
  • Wafer size:5 inch (Ø125mm), Thickness 0.5mm~0.7mm
  • Material:Teflon / PFA
  • Slot Pitch:4.76mm ±0.38mm

CK6-25-PFA

  • Product name:6″ Teflon Cassette / PFA Cassette
  • Dimension:179(L)*147(W)*175(H)mm
  • Weight:1045.4g
  • Capacity:25 PCS
  • Wafer size:6 inch (Ø150mm)
  • Material:Teflon / PFA
  • Slot Pitch:4.76mm

CK8-25-PFA

  • Product name:8″ Teflon Cassette / PFA Cassette
  • Dimension:233(L)*220(W)*225(H)mm
  • Weight:1407g
  • Capacity:25 PCS
  • Wafer size:8 inch (Ø200mm)
  • Material:Teflon / PFA

CK6-12-PFA

  • Product name:6″ Teflon Cassette / PFA Cassette
  • Dimension:177(L)*145(W)*173(H)mm
  • Weight:860g
  • Capacity:12 PCS
  • Wafer size:6 inch (Ø150mm)
  • Material:Teflon / PFA

CK8-13-PFA

  • Product name:8″ Teflon Cassette / PFA Cassette
  • Dimension:203.05(L)*233.05(W)*218.44(H)mm
  • Weight:1800g
  • Capacity:13 PCS
  • Wafer size:8 inch (Ø200mm)
  • Material:Teflon / PFA

CK12-13-PFA

  • Product name:12″ Teflon Cassette / PFA Cassette
  • Dimension:355(L)*180(W)*325(H)mm
  • Weight:3600g
  • Capacity:13 PCS
  • Wafer size:12 inch (Ø300mm)
  • Material:Teflon / PFA
  • Slot Pitch:4.76mm

CK6-25-PFA (Low Profile)

  • Product name:6″ Teflon Cassette / PFA Cassette (Low Profile)
  • Dimension:177(L)*140(W)*115(H)mm
  • Weight:666.9g
  • Capacity:25 PCS
  • Wafer size:6 inch (Ø150mm)
  • Material:Teflon / PFA

CK8-25-PFA (Low Profile)

  • Product name:8″ Teflon Cassette / PFA Cassette (Low Profile)
  • Dimension:235(L)*215(W)*160(H)mm
  • Weight:1407g
  • Capacity:25 PCS
  • Wafer size:8 inch (Ø200mm)
  • Material:Teflon / PFA

 

 

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  • PFA Cassette / Teflon Cassette, Capacitor of wafer can be customized and designed by customers’ request, able to resist strong acid, strong hydrofluoric acid, strong base and heat up to 200~220℃, use to deliver wafers in acid & base process of Fabrication factory.
  • Able to do laser engraving、
  • Able to install RFID. Keep the track of carrier and material.


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