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by TRION
Minilock Orion PECVD

Deposition


Minilock Orion PECVD


The Minilock-Orion is a Plasma Enhanced Chemical Vapor Deposition system with a vacuum loadlock that produces...

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by TRION
Trion Orion PECVD

Deposition


Orion PECVD


The Orion Plasma Enhanced Chemical Vapor Deposition System produces production-quality films on a compact platform. The...

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by TRION
Trion Phantom RIE

Dry Processing


Minilock - Phantom RIE


The Minilock – Phantom RIE is a Reactive Ion Etch system with a vacuum loadlock. The...

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