TRION
TRION R&D RIE systems for sale. High quality enhanced plasma etchers available from S3 Alliance. Contact us for more details or a quotation.
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Deposition
Minilock Orion PECVD
The Minilock-Orion is a Plasma Enhanced Chemical Vapor Deposition system with a vacuum loadlock that produces...
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Deposition
Orion PECVD
The Orion Plasma Enhanced Chemical Vapor Deposition System produces production-quality films on a compact platform. The...
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Deposition, Dry Processing
Oracle Cluster CVD RIE System
The smallest and most flexible full production cluster system on the market.
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Dry Processing
Titan Loadlocked RIE with VCE
Very compact, fully automated, vacuum loadlocked plasma system for semiconductor production.
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Dry Processing
Minilock - Phantom RIE
The Minilock – Phantom RIE is a Reactive Ion Etch system with a vacuum loadlock. The...
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Dry Processing
Gemini Multi-Chamber Stripper
Compact multi-chamber, high throughput stripping system.
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