Lumina Instruments is a Global Supplier of Innovative Optical Inspection Systems

for full-surface defect detection, mapping and classification on transparent, translucent and opaque substrates.

Founded by a team of experts with decades of experience in optical inspection, Lumina Instruments builds cutting-edge systems. These are for surface and internal defect detection. By utilizing 4 detection channels operating simultaneously, Lumina’s patented technology offers unmatched performance, enhancing yield control and management in key industries including semiconductor, consumer electronics, as well as the rapidly growing glass market in high-tech products.

Lumina Instruments is a privately held company headquartered in San Jose, California.

 

Lumina is working with four detection channels. They operate simultaneously to generate four separate images. Each channel aids in detecting and classifying certain defects:

Lumina Instruments, Innovative Optical Inspection Systems, Polarization, Reflectivity, Surface Slope, Dark Field

  • Polarization: Film Defects, Stains
  • Reflectivity: Scratches, Internal Stress*, Striations within Glass*
  • Slope: Scratches, Pits, Bumps, Surface Topography
  • Dark Field: Nanoparticles, Inclusions

*Reflectivity off of the top and bottom surfaces provides these results.

 

Lumina AT1 System

Lumina AT1-Auto-Wafer Loader

Lumina AT1 System

The Lumina AT1 System is capable of scanning any flat shape less than or equal to 300 mm x 300 mm.

 

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Lumina AT1-Auto

The Lumina AT1-Auto System is capable of scanning any flat shape less than or equal to 300 mm x 300 mm. In addition, it is equipped with a single arm robot/automated cassette handler for 150 and 200 mm circular wafers.

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Lumina AT2 System Lumina AT2-EFEM System

Lumina AT2 System

The Lumina AT2 System is capable of scanning any flat shape less than or equal to 450mm x 450mm.

 

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Lumina AT2-EFEM System

The Lumina AT2-EFEM System integrates the Lumina AT2 with an Equipment Front End Module (EFEM) to enable a fully automated production system for 300mm wafers with factory automation capability.

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