table Top MiniSEM

The University of Hamburg has received a Table Top SEM from SEC for the investigation of „Advanced Materials“ . The installation by S3 Alliance went smoothly.  Similar device is available in our office as s demo version to show customers the performance and applications.

Product Description:

The most appropriate Table-top SEM for the surface inspection with 10,000x of magnification which is main inpsection range by SEM
Entry-level Table-top SEM with 15nm resolution & 60,000x magnification

  • Create images with the height level informaiton. Mostly used for surface inspection
  • Convenient stage movement by 3-axis and able to operate easily and conveniently with mouse control in U.I
  • Able to get various analysis results with various scan modes measurement tool

Product Specifications SNE 3200 M:

Electron System
Resolution
15nm (30kV, SE Image)
20nm (30kV, BSE Image)
Magnification 20x~60,000x
Accelerating Voltage 1~30kV (1/5/10/15/20/30)
Detector
Secondary Electron Image(SE)
Backscattered Electron Image(BSE)
Electron Gun Pre-centered Tungsten Filament Cartridge
Stage System
Stage Traverse
3-axis System (X, Y, R, Z, T – Manual)
X, Y-axis : 35mm / R-axis : 360°
* Image Shift : ±150μm
* CCD Camera installed in the Chamber
* T-axis : 0 to 45˚ (Option)
Max. Sample Size 70mm in Diameter x 30mm in Height
Image System
Automation Function
Auto Start, Auto Focus,
Auto Stigmator, Auto Contrast & Brightness
Image Format BMP, JPEG, PNG, TIFF
Vacuum System
Vacuum Mode High & Low Vacuum
Vacuum Pump Rotary Pump / Turbo Molecular Pump (Full Automation)
Dimensions
Main Unit 390(W)x380(D)x560(H)mm, 83kg
Controller Unit 390(W)x325(D)x560(H)mm, 37kg
Rotary Pump 400(W)x160(D)x340(H)mm, 24kg