By SECSupplier Info
Metrology & Handling
- Non-destructive analysis of semiconductor, SMT, and electron/electric components
- Hybrid Tube Option (160kv/500㎛, 10,000hrs/filament)
- Dual CT – High-quality CT image / high speed scan
Best performance Xray Void Inspection System
High-performance Micro-focus Open Tube with 160kV is installed and fine defects of 1㎛ are detectable.
High-resolution X-ray image can be gained with world best magnification by installing high-price Open Tube as standard.
Dual CT function can be purchased additionally, and exact location & size of defects can be detected and analyzed with this function.
|X-ray Tube||160 kV / 200 µA (option 160 kV / 500 µA)|
|Min. Resolution||0.8 µm|
|Table Size||460 X 510 mm (option 550 X 650 mm)|
|AXIS||X, Y, Z, Tilt (70º), R, Y-aft, Cone beam R|
|Detector||1.6 M Pixel FPD|
|CT Scan Method||Oblique CT / Cone beam CT|
|Dimension||1,340(W) x 1,950(D) x 1,630(H)mm / 2,000kg|