WLO-x00

Product Enquiry

Product Enquiry Form

By MACTRONIX

Supplier Info

Product Type:

Metrology & Handling


Application:

Handling/Automation


Product Description:

  • User friendly Windows® based software
  • Touch screen user interface
  • Automatically aligns wafer flats to a preselected position and raises them in an inclined manner presenting them for viewing by the operator and/or camera.
  • As with all Macronix wafer handling systems, the WLO can accommodate a wide variety of wafer cassettes/carriers.
  • As a convenience, the foot print and weight of the WLO is small enough to be placed near any work environment.
  • Cassette/carrier sensors located in the platform prevent the machine from operating if the required carriers are not present.
  • RS232 communications port.
  • Uptime will exceed 99.25%.
  • MTBF (mean time between failure): 2,500 hours
  • MTBA (mean time between assist): 1,000 hours
  • MTTR (mean time to repair): less than 1 hour

Get in touch with S3 Alliance for a quotation for wafer automation and batch transfer systems.

 


Specifications

  • Power:
  • 220/110VAC    50/60Hz    Single Phase
  • 2 Amp @ 110VAC
  • Wafer Size:
  • 4″ (100mm)  thru  8″ (200mm)
  • Exhaust:
  • 1.25″ Diameter port; 5 CFM max (non-process)
  • Weight:
  • ≈ 45 Lbs.
Options
  • Bar Code Scanning
  • GEM SECS compatibility
  • Stainless steel covers

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Product Enquiry Form