Wafer Geometry Measurement System UltraMap-APBP

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By MICROSENSE

Supplier Info

Product Type:

Metrology & Handling


Application:

Wafer Dimensional Metrology


Product Description:

The UltraMap 200-BP Wafer measurement system precisely measures wafer thickness, flatness and shape using MicroSense’s patented non-contact auto-probe back pressure technology.  The UltraMap 200-BP is an extremely flexible system since it can measure a wide range of wafer thicknesses and any wafer material.  Wafer surface finish has no effect on the measurement – the UltraMap BP-200 measures as sawn, lapped or polished wafers.


Measure Wafers with High Bow and Warp

The UltraMap 200-BP is designed to measure wafers with up to +/- 2500 microns of warp.
Accurate Wafer Measurement

  • 0.5 micron absolute thickness measurement accuracy on wafers with <500 micron bow
  • 1.5 micron absolute thickness accuracy on wafers with >500 micron and <1000 micron bow
  • Auto calibration of back pressure sensors with integrated calibration standards – no need for master wafers
  • High repeatability, non-contact air bearing stage for repeatable wafer positioning

System Configurations

The UltraMap 200-BP is offered in 3 configurations – manual loading bench top system, freestanding, autoloading system with robot and two cassettes, and fully auto sorting system with robot and up to 6 cassettes.

System Options

  • Wafer holders for various wafer diameters and thicknesses
  • Wafer pre-aligner
  • OCR reader – one side or two sides
  • SECS/GEM

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