TEL Mark 7 track system

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By APPLET

Supplier Info

Product Type:

Equipment


Application:

Photolithography


Product Description:

  • AppleT can provide fully refurbished TEL Clean Track Mark7/8
  • Mark7/8 is primarily used for adhesion promoter coating, coating, pre-baking, development, and post-baking.
  • Mark7/8 automates each process in photolithography
  • The unit available in the system are:
    • Adhesion unit
    • Coater unit
    • Hot-plate unit
    • Developer unit
    • Hot-plate unit


Any configuration is possible:

  • addition or removal of COT/DEV
  • Add or remove CPL, LHP

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