TEL Lithius Track System

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By APPLET

Supplier Info

Product Type:

Equipment


Application:

Photolithography


Product Description:

The TEL Lithius platform offers responsiveness and stability required for state of the art processing for the next generation  300mm devices.

AppleT can offer refurbished systems and/or subsystem modifications for the following:

  • Lithius Bake plate Exhausts
  • Standard Coater Bake plate exhaust lines
  • Anti-reflective Coating (ARC) and Post Exposure Bake (PEB) exhaust lines


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