The TEL Lithius platform offers responsiveness and stability required for state of the art processing for the next generation 300mm devices.
AppleT can offer refurbished systems and/or subsystem modifications for the following:
- Lithius Bake plate Exhausts
- Standard Coater Bake plate exhaust lines
- Anti-reflective Coating (ARC) and Post Exposure Bake (PEB) exhaust lines