TEL ACT12 Track System

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Product Description:

AppleT can provide fully refurbished TEL Clean Track ACT12. All systems can be modified to suit process needs including LHS/RHS orientation, Coater modules, Bake and Chill modules as well as HMDS upgrades

  • ACT12 is primarily used for adhesion promoter coating, coating, pre-baking, development, and post-baking.
  • ACT12 automates each process in photolithographhy
  • The unit available in the system are:
    • Adhesion unit
    • Coater unit
    • Hot-plate unit
    • Developer unit
    • Hot-plate unit

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