Metrology & Handling
Wafer Dimensional Metrology
Surface Acoustic Microscope- AIMS-Accoustic Intenstity Measurement System
- Frequency Range : 1 – 500MHz
- Low noise, high performance pulser/receiver derives the ultrasonic signal of ultra wide-bandwidth characteristics from the transducer.
- Real time 500MHz Sampling Rate
- 3 Axis Linear servo/stepping motor
- Index Axis
- Vertical Axis
▶ All customized
- Max. Speed 300mm/s
- Repeatability 0.02micron
- Power AC220V
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Used in the semiconductor and industrial ultrasonic sound pressure measurement line
/SEE ACOULAB WEB and Pictures on S3 APPLICATION WEB