SAM- TITAN Surface Acoustic Microscope

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Product Type:

Metrology & Handling


Wafer Dimensional Metrology

Product Description:

Scanning Acoustic Microscope for Semiconductor and Industrial Materials.

  • Measures the thickness of materials
  • Measures the location and the size of flaw (Debonding, Delamination, Crack) inside materials and on the surface.
  • Low noise by using the highly efficient linear-servo motor
  • Natural scanning & Improve the S/N[signal-to-noise] ratio
  • High quality and accurate scanning image
  • Suitable for the large size boards(PCB) and components
  • Water jet scan system
  • Auto sliding door system
  • A, C, T Scan

1. Ultrasonic Pulser/Receiver
  • Frequency Range : 1 – 500MHz
  • Low noise, high performance pulser/receiver derives the ultrasonic signal of ultra wide-bandwidth characteristics from the transducer.
2. A/D Converter
  • Real time 2GHz Sampling Rate , 1GHz Bandwidth
3. Mechanical Scanner
  • Scan Axis (Linear servo motor)
  • Max. Stroke 750mm
  • Max. Speed 1000mm/s
  • Repeatability +/-2 micron
  • Encoder Resolution 0.5micron
  • Index Axis
  • Micro-stepping motor with lead screw
  • Max. Stroke 750mm
  • Step Resolution 1micron
  • Vertical Axis
  • Micro-stepping motor with lead screw
  • Max. Stroke 70mm
  • Vertical Resolution 2.5micron
4. General
  • Water circulation pump with filter
  • Immersion Tank Dimension  950mm x 1050mm x 135mm
  • C- Scanning Area with T-Scan  750mm x 300mm
  • Main Unit SIZE  1400mm X 1380mm X 1500mm (Without Monitor)
  • Weight  Approx. 700kg
  • Power  AC220V / 15A (1Phase)
  • Pneumatic  5 ~ 6 kgf/cm2

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  • Semiconductor : Flip Chip, BGA, QFT, TBGA, FBGA, SOP, FET, MLCC, PCB
  • Industrial : ITO Target, Wafer, Pipe, Plate, Bar, Complex Material, Piston test, Flaw detection in Planting, Car Engine, Weld zone

Product Enquiry Form