SAM DENEB Surface Acoustic Microscope

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Product Type:

Metrology & Handling


Wafer Dimensional Metrology

Product Description:

Scanning Acoustic Microscope for Semiconductor and Industrial Materials. DENEB is a standard type of SAM equipment.

  • Measures the thickness of materials
  • Measures the location and the size of flow (Debonding, Delamination, Crack) inside materials and on the surface
  • Low noise by using the highly efficient linear-servo motor
  • High quality and accurate scanning image
  • A, C, T Scan

1. Ultrasonic Pulser/Receiver
  • Frequency Range : 1 – 500MHz
  • Low noise, high performance pulser/receiver derives the ultrasonic signal of ultra wide-bandwidth characteristics from the transducer.
2. A/D Converter
  • Real time 2GHz Sampling Rate , 1GHz Bandwidth
3. Mechanical Scanner
  • Scan Axis (Linear servo motor) Max. Stroke 350mm Max. Speed 1,000mm/s Repeatability +/-0.5 micron Encoder Resolution 0.5micron
  • Index Axis Micro-stepping motor with lead screw Max. Stroke 350mm Step Resolution 0.5micron
  • Vertical Axis Micro-stepping motor with lead screw Max. Stroke 70mm Vertical Resolution 2.5micron
4. General
  • Water circulation pump with filter
  • Immersion Tank Dimension 500mm x 520mm x 100mm
  • C- Scanning Area with T-Scan 350mm X 350mm X 70mm
  • Main Unit SIZE 950mm X 900mm X 1350mm
  • Weight Approx. 250kg
  • Power AC220V / 20A

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Semiconductor: Flip Chip, BGA, QFT, TBGA, FBGA, SOP, FET, MLCC, PCB

Industrial: ITO Target, Wafer, Pipe, Plate, Bar, complex Material, Piston test, Flaw detection in Planting, Car Engine, Weld zone

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