SAM ATHLON Surface Acoustic Microscope ITO targets

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Product Type:

Metrology & Handling


Wafer Dimensional Metrology

Product Description:

  • Customized scan range and size of axis, tank and the whole frame (over 1500mm size)
  • Auto up/down immersion tank system (lifer) & roller for rotary target (roller)
  • Air blower for high speed drying of the sample
  • High speed and resolution of scanning image
  • Various options are available
  • A, C, T Scan

1. Ultrasonic Pulser/Receiver
  • Frequency Range : 0 – 500MHz
  • Low noise, high performance pulser/receiver derives the ultrasonic signal of ultra wide-bandwidth characteristics from the transducer.

2. A/D Converter

  • Real time 500MHz Sampling Rate
3. Mechanical Scanner
  • Scan Axis (Linear servo motor-Option)
  • Index Axis
  • Vertical Axis
    ▶ All customized
4. General
  • Power  AC220V / 30A (3Phase)

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