Metrology & Handling
Wafer Dimensional Metrology
- Customized scan range and size of axis, tank and the whole frame (over 1500mm size)
- Auto up/down immersion tank system (lifer) & roller for rotary target (roller)
- Air blower for high speed drying of the sample
- High speed and resolution of scanning image
- Various options are available
- A, C, T Scan
1. Ultrasonic Pulser/Receiver
- Frequency Range : 0 – 500MHz
- Low noise, high performance pulser/receiver derives the ultrasonic signal of ultra wide-bandwidth characteristics from the transducer.
2. A/D Converter
- Real time 500MHz Sampling Rate
3. Mechanical Scanner
- Scan Axis (Linear servo motor-Option)
- Index Axis
- Vertical Axis
▶ All customized
- Power AC220V / 30A (3Phase)
There are currently no downloads available.
There are currently no videos available.
Theres currently no information available for application.