SUN – Mask Reticle Inspection System

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Supplier Info

Product Type:

Metrology & Handling


Optical Surface Inspection

Product Description:

▪ Particle inspection on all area of reticle :

   – Pellicle, Pellicle Frame, Pattern, Backside

▪Multi-scanning with vertical and oblique optical system

▪ Inspection of various reticles with 1 recipe

   – No prior work for each mask needed

▪ Applicable to full automation
▪ 0.5um pinhole/particle detection in non-pattern area
▪ Optional function to distinguish particle position at
top/bottom of the pellicle
▪ Verifying review module included

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