Sapphire C-plane Slurry

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Product Type:

Parts & Consumables


CMP Consumables

Product Description:

These CMP slurries have the ability to achieve extremely high polish rates on C-plane sapphire wafers. Based on the pad integration, slurries can be tailored for optimum performance

  • SL7000 Series
  • SL4000 Series

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CMP of sapphire wafers

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