OAK – Automatic Wafer Scope Inspection

Product Enquiry

Product Enquiry Form

By ATI

Supplier Info

Product Type:

Metrology & Handling


Application:

Optical Surface Inspection


Product Description:

▪ Verify Rework System(VRS) :
– Camera : Color Verification 1M Area Camera
– Scope : 5X, 10X, 20X, 50X, 100X, 150X

▪ Auto Focus
– Focus Sensor : ADS (ATI Depth Sensor)
– Repeatability : [email protected]σ

▪ Function
– Auto Focus
– Image Saving
– CD Measurement
– KLARF / MAP File Automation


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Product Enquiry Form