Metrology & Handling
Optical Surface Inspection
– Polish, PSS, Epi, LED FAB process Monitoring & Inspection
– Inspection for LED Wafer Pre-alignment & LED Wafer Macro with Camera
– Using 8 Load Ports, Long Time Automatic Inspection and Sorting Function by Grade is Available.
There are currently no specification available.
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▪ Inspection Item
– Polish : Pit, Particle
– PR : FM, Scratch, Particle
– PSS : FM Residue, No Pattern, Particle
– Epi : Pit, Pinhole, Press NG, Particle
– FAB : Pad defect, Epitaxial Defect,
Finger defect, ITO defect, Mesa Line, etc.