LED Sapphire Wafer Inspection System

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Supplier Info

Product Type:

Metrology & Handling


Optical Surface Inspection

Product Description:

– Polish, PSS, Epi, LED FAB process Monitoring & Inspection
– Inspection for LED Wafer Pre-alignment & LED Wafer Macro with Camera
– Using 8 Load Ports, Long Time Automatic Inspection and Sorting Function by Grade is Available.


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▪ Inspection Item

– Polish : Pit, Particle
– PR : FM, Scratch, Particle
– PSS : FM Residue, No Pattern, Particle
– Epi : Pit, Pinhole, Press NG, Particle
– FAB : Pad defect, Epitaxial Defect,
Finger defect, ITO defect, Mesa Line, etc.

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