Ion Sputter Coater G20

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Product Enquiry Form

By GSEM

Supplier Info

Product Type:

Metrology & Handling


Application:

Scanning Electron Microscope


Product Description:

This equipment creates plasma on the surface of nonconductive and slightly conductive specimens to form metallic thin fi lms and is a pre-treatment equipment that must be carried out when analyzing electron microscope (SEM). The target is mostly gold(Au) or platinum(Pt), and depending on the condition of the specimen, the thickness can be changed by adjusting the current and time.

 

Major Features:

● Easy Operation with 7” Touch Screen

● Vacuum-Auto Coating-Vent w/ One Touch Operation

● Parameter Saving with Library Function(Max.10)

● 7 Sample Stubs(Φ14mm) Together in Chamber

● Prevent damage to Specimens(Low Current:1~10mA)

● Minimize Footprint with Compact Product Size

● Very Good Uniformity with Pirani Gauge Inside

 

Functions:

● Current : 1 to 10mA(1mA/Step)

● Time : 1 to 600sec(1sec/Step)

● Library : Max. 10 different coating condition

● Plasma : 0 to 9(Plasma on/off to minimize sample damage)


Applications:

● Metal thin film coating on the surface of nonconductive and slightly conductive specimens

● Metal thin film deposition such as Au and Pt by sputtering deposition method

● Micro structure Analysis or Failure Analysis(Broken Sections) (Materials and products such as semiconductor parts, ceramics, metals, powder, etc)


Product Enquiry Form