SiC High planar SC-SX slurry

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By SINMAT

Supplier Info

Product Type:

Parts & Consumables


Application:

CMP Consumables


Product Description:

These slurries are designed to achieve high removal rates with excellent surface finish on single crystal Si-face SiC wafers.

Unique Aspects of Silicon Carbide ( SiC) Polishing Technology

  • Ultra-high Polishing rates (up to 10 times faster than existing processes)
  • Achieve atomically smooth surfaces with no damage
  • Polish all surface types (lapped or mechanically polished) into epiready finish
  • Both Si-face, C-face and single or polycrystalline surfaces


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These slurries are designed to achieve high removal rates with excellent surface finish on single crystal Si-face SiC wafers.


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