ErgoSCRUB Ergonomic Scrub Head

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By FOAMTEC

Supplier Info

Product Type:

Parts & Consumables


Application:

Cleaning Accessories


Product Description:

ErgoSCRUB, An ergonomic handle used with ScrubDISKS to remove process deposition from vacuum chambers.

ErgoSCRUB® was designed to provide technicians with a soft, ergonomically-correct, scrubbing tool to remove process residue from vacuum chambers used in CVD, PECVD, PVD, Sputtering, Plasma Etch, RIE and Ion Implant Processes in the Semiconductor, LCD, Solar Cell, Optics and Hard Disk Drive industries.


FT900 – PSA Series – Soft Handle Compatible With: PSA ScrubDISKS®
FT901 – Velcro Series – Soft Handle Compatible With: Velcro ScrubDISKS®
FT950 – PSA Series – Firm Handle Compatible With: PSA ScrubDISKS®
FT951 – Velcro Series – Firm Handle Compatible With: Velcro ScrubDISKS®

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Wet-Cleaning of CVD, PECVD, PVD, Sputtering, Plasma Etch, RIE and Ion Implant Process Chambers in Semiconductor wafer fabs.


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