Atomic Basic

Product Enquiry

Product Enquiry Form

By CN1

Supplier Info

Product Type:

Equipment


Application:

ALD


Product Description:

Simple & compact System

  • System Specification
  • Compact ALD Model
  • Thermal ALD
  • Wafer Size : ≤ 6″ Wafer
  • Process temperature : up to 250°C
  • Applications : Oxide Film(Al₂O₃), etc
  • Very small Volume for process


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Product Enquiry Form