By TRION
Supplier Info
Product Type:
Equipment
Application:
Dry Processing
Product Description:
The cost of new stripping systems has escalated to unreasonable levels. Trion has solved this critical problem.
The Trion Atlas Stripper is a compact, inexpensive, and versatile system that can be configured for a 200mm or 300mm Chuck. By employing RF bias power, difficult-to-remove layers of resist can be removed at low temperatures. As required by the application, this system can incorporate a microwave source (which is both reliable and free from typical microwave tuning problems) or ICP technology.
- Etch rates up to 6 μm/min
- High throughput
- Low plasma damage
- Automatic tuning
- 100 mm to 300 mm wafers
- Small footprint
- Competitively priced
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MEMS, Compound Semiconductor, Pilot Line Production.