TITAN head retrofit for an IPEC472 CMP
Axus has delivered a TITAN head retrofit for an IPEC 472 CMP system to the Fraunhofer ENAS in Chemnitz.
Dr. Gottfried commented:
„With this retrofit we gain huge flexibility and a much better process performance at the same time. From now, the IPEC 472 is able to work with 150mm and 200mm advanced membrane carriers. Running the equipment in manual or semi-automatic mode, as usual in R&D environments, requires less than 15 minutes for a diameter conversion. In addition, an 100mm membrane carrier specifically developed by Axus, enables for the first time an advanced CMP process capability for 100mm substrates. In summary, this retrofit gives a second life to IPEC 472. It opens a broad range of R&D work using advanced CMP process setups for a number of years. The process quality is comparable to standard CMP tools in semiconductor fabrication. To give an example: we are able to achieve less than 3% non-uniformity on an 200mm wafer for an oxide CMP step.“