O-rings

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By Sealtech

Supplier Info

Product Type:

Parts & Consumables


Application:

O-rings


Product Description:

Products delivered by Sealtech

  • Dupra is a FFKM brand of Daikin Industry. This advanced solution has been provided to Green Tweed in US and Seal Tech in Korea since 2000. It is comparable to Kalrez but with even better performance and pricing.
  • rectuz is a brand of Sealtech’s FFKM (Perfluoroelastomer), which was newly created in 2010 to quickly respond to customer’s needs and specific requirements, providing an excellent material for various custom solutions.
  • chemipol is the first fluorine O-ring for semiconductors, introduced in Korea since 1990. It is a classic line that has been widely used in the industry for a long time as Co-Polymer and Ter-Polymer solutions.

 

Product Description rectuz E1:

Rectuz E1 is specially designed for Etch and CVD solutions. With 100% organic components in its base, E1 is an ideal solution for a harsh plasma environment.

Features:

  • Ideal for the temperature range between -20°C and +300°C
  • 100% Organic
  • Particle Free
  • Ideal for NF3, O2, SiH4, N2O gas and plasma

Overall performance:

Product Description rectuz D1:

rectuz D1 was especially developed for diffusion processes. This compound has

extreme resistance against gases like BCl3, TiCl4, NH3, etc.

Also, RTZ D1 is an excellent solution for both, static and dynamic applications.

Features:

  • Ideal for the temperature range between -20°C and +300°C
  • Robust mechanical properties
  • Strong resistance against NF3, O2, NH3, TiCl4, BCl3 (gas and plasma)

 

Overall performance:

Product Description rectuz C1:

RTZ C1 is a FFKM solution that maximizes Ozone resistance and is widely used in many CVD processes. RTZ C1 boasts with a long life expectancy in various environments and very stable heat resistance.

Features:

  • Ideal for the temperature range between -20°C and +300°C
  • Robust mechanical properties

Strong resistance against NF3, O2, O3, TiCl4, BCl3 (gas and plasma)

Overall performance:

Product Description chemipol 7170:

Characteristics of  chemipol  7170:

Co-polymer FKM, also known as “Viton”, is the most widely used O-ring solution for general purpose. Sealtech provides this CP-FKM under the brand CMP 7170, in a new interpretation with advanced performance.

Features:

  • Ideal for the temperature range between -10°C and +200°C
  • Robust mechanical properties for many requirements
  • Advanced abrasion resistance

Overall performance:

 

 

 

 

 

 

 

 

 

 


Physical Properties rectuz E1

Properties Value
Polymer type FFKM
Color Beige
Specific Gravity (g/l) 2.10
Hardness (Shore A)*2 70
Modulus @ 100% (Mpa)*2 2.8
Tensile Strength (Mpa)*2 12.5
Elongation (%)*2 260
Compression Set (%)
72hrs @ 200°C*4 12.0
72hrs @ 300°C*4 30.0
Max. Serv. Temp. (°C) 300

 

Physical Properties rectuz D1

Properties Value
Polymer type FFKM
Color Black
Specific Gravity (g/l) 2.10
Hardness (Shore A)*2 80
Modulus @ 100% (Mpa)*2 10.7
Tensile Strength (Mpa)*2 13.6
Elongation (%)*2 183
Compression Set (%)
72hrs @ 200°C*4 20.1
72hrs @ 300°C*4 21.8
Max. Serv. Temp. (°C) 300

 

Physical Properties rectuz C1

Properties Value
Polymer type FFKM
Color Dark Gray
Specific Gravity (g/l) 2.10
Hardness (Shore A)*2 75
Modulus @ 100% (Mpa)*2 8.0
Tensile Strength (Mpa)*2 15.0
Elongation (%)*2 210
Compression Set (%)
72hrs @ 200°C*4 13.0
72hrs @ 300°C*4 27.0
Max. Serv. Temp. (°C) 300

 

Physical Properties chemipol 7170

Properties Value
Polymer type FKM
Color Black
Specific Gravity (g/l) 2.10
Hardness (Shore A)*2 60, 70, 80
Modulus @ 100% (Mpa)*2 3.0, 6.2, 9.4
Tensile Strength (Mpa)*2 10.1, 14.7, 14.0
Elongation (%)*2 268, 221, 167
Compression Set (%)
72hrs @ 200°C*4 9.0
72hrs @ 300°C*4 N/A
Max. Serv. Temp. (°C) 200

 

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Suggested processes for rectuz E1:

HDP, SiN, BPSG, HARP, ACL, Oxide, Poly, TEOS, Metal, UV, ULK, SiCOH, etc.

 

Suggested processes for rectuz D1:

HT-SiN, ALD-SiN, ALD Oxide, Metal, etc.

 

Suggested processes for rectuz C1:

SiN, Oxide, Metal, Poly, HSG, Anneal, HTO, etc.

 

Suggested processes for chemipol 7170:

All general-purpose sections with absence of harsh gasses or plasma


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