MicroSense, LLC

MicroSense, LLC, previously known as ADE Technologies, is comprised of three primary businesses – precision capacitive sensors, vibrating sample magnetometers and magneto-optical Kerr effect (MOKE)tools for state-of-the-art magnetic measurement and wafer measurment systems. Until the company was sold in November, 2009, we were a subsidiary of KLA-Tencor Corporation, a leading global supplier of semiconductor wafer defect inspection and metrology tools.  MicroSense serves a host of industries including semiconductor equipment, data storage, machine tool, solar, automotive and high brightness LED. MicroSense provides customer value and security, through extensive business experience, financial strength, world-wide support, and technical Leadership.

Pioneering High Resolution Measurement with Capacitive Sensors

Founded in 1967 by Robert C. Abbe, our capacitive sensor business was originally a part of ADE Corporation. ADE Corporation was renowned for its visionary and novel approaches to high resolution, non-contact measurement for demanding dimensional gaging applications.  Over time, ADE grew to become the world’s leading supplier of tools for bare semiconductor wafer measurement. High resolution capacitive sensors for position and displacement measurement (also known as “cap gages”) became synonymous with “ADE” and our trademarked name, “MicroSense”.

MicroSense provides capacitive sensors and OEM metrology modules, based on patented capacitive sensing technology, to make very precise, high bandwidth measurements of precision products such as solar wafers, sapphire wafers, hard disk drive motors, air bearing spindles, precision X-Y stages, optical disks, automotive parts and machine tools. Our capacitive displacement sensors provide the highest resolution in the industry, less than 0.05 nanometers, exceptional stability and virtually unlimited service life.

Innovative Tools for Wafer Dimensional Measurement

MicroSense offers high-sensitivity wafer measurement tools for characterizing sapphire, silicon carbide and various types of semiconductor wafers. MicroSense acquired SigmaTech, Inc. of Tempe, Arizona in June, 2012.  With this acquisition, MicroSense added leading-edge wafer inspection tools to its portfolio of innovative metrology solutions. SigmaTech systems integrate multiple sensing technologies such as optical spectrometry, interferometry and SigmaTech’s patented auto-positioning back pressure (APBP) Technology.