OnTrak DSS-200 Series 1 Post CMP Scrubber

Product Enquiry

Product Enquiry Form

By AXUS

Supplier Info

Product Type:

Equipment


Application:

CMP, Wet Process


Product Description:

OnTrak DSS-200 Series 1 Post CMP Cleaner. OnTrak DSS 200 Series 1 Double-sided PVA Scrubber is designed to clean 100mm to 200mm wafers. It provides consistent, ultra-clean processing for a wide variety of applications.


Standard Features Include:
  • DSS200-1-xp web
  • Universal load station
  • Double sided PVA scrub
  • Dual brush boxes
  • Ammonia dispense
  • IR assisted spin dry station
  • Robotic unload
  • Vertical unload station
  • Touchscreen controls
Optional Features:
  • Megasonics at spin dry station
  • Wafer size kits for 100 to 200mm
  • Signal light tower

The DSS-200 Series 1 is a proven, cost-effective cleaning system for the following applications.
  • Post-Chemical-Mechanical Polishing (CMP) Cleaning: Oxide, Polysilicon, Nitride, Tungsten, Aluminum and Copper
  • General purpose cleaning: post-CVD oxides, post-metallization, surface topography cleaning, trench cleaning
  • Silicon cleaning: prime silicon; reclaim silicon, fab monitor reclaim


Product Enquiry Form