By AXUS
Supplier InfoProduct Type:
Equipment
Application:
CMP, Wet Process
Product Description:
OnTrak DSS-200 Series 1 Post CMP Cleaner. OnTrak DSS 200 Series 1 Double-sided PVA Scrubber is designed to clean 100mm to 200mm wafers. It provides consistent, ultra-clean processing for a wide variety of applications.
Standard Features Include:
- DSS200-1-xp web
- Universal load station
- Double sided PVA scrub
- Dual brush boxes
- Ammonia dispense
- IR assisted spin dry station
- Robotic unload
- Vertical unload station
- Touchscreen controls
Optional Features:
- Megasonics at spin dry station
- Wafer size kits for 100 to 200mm
- Signal light tower
file_downloadOnTrak_DSS200_Series_1_Rev_02_06_10.pdf
The DSS-200 Series 1 is a proven, cost-effective cleaning system for the following applications.
- Post-Chemical-Mechanical Polishing (CMP) Cleaning: Oxide, Polysilicon, Nitride, Tungsten, Aluminum and Copper
- General purpose cleaning: post-CVD oxides, post-metallization, surface topography cleaning, trench cleaning
- Silicon cleaning: prime silicon; reclaim silicon, fab monitor reclaim