Product Type:
Equipment
Application:
Etching
Product Description:
The Minilock – Phantom RIE is a Reactive Ion Etch system with a vacuum loadlock. The Loadlock allows the main chamber to continue pumping whilst a sample is loaded, or unloaded, and is ideal for toxic gas chemistries.
The system is highly configurable with such options as a ICP, and endpoint.
There are currently no specification available.
file_downloadMinilock-Phantom-RIE-Brochure.pdf
There are currently no videos available.
Compound Semiconductor, Failure Analysis, Research & Development, Pilot Line.