Mini SEM

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By SEC

Supplier Info

Product Type:

Equipment


Application:


Product Description:

The most appropriate Table-top SEM for the surface inspection with 10,000x of magnification which is main inpsection range by SEM
Entry-level Table-top SEM with 15nm resolution & 60,000x magnification

  • Create images with the height level informaiton. Mostly used for surface inspection
  • Convenient stage movement by 3-axis and able to operate easily and conveniently with mouse control in U.I
  • Able to get various analysis results with various scan modes measurement tool


SNE 3000 MS

Electron System
Resolution 15nm (30kV, SE Image)
Magnification 20x~60,000x
Accelerating Voltage 1~30kV (1/5/10/15/20/30)
Detector Secondary Electron Image(SE)
Electron Gun Pre-centered Tungsten Filament Cartridge
Stage System
Stage Traverse
3-axis System (X, Y, R – Manual)
X, Y-axis : 40mm / R-axis : 360°
* Image Shift : ±150μm
* Tilt-axis : 0~45° (Option)
Max. Sample Size 70mm in Diameter x 30mm in Height
Image System
Automation Function
Auto Start, Auto Focus,
Auto Stigmator, Auto Contrast & Brightness
Image Format BMP, JPEG, PNG, TIFF
Vacuum System
Vacuum Mode High Vacuum
Vacuum Pump Rotary Pump / Turbo Molecular Pump (Full Automation)
Dimensions
Main Unit 390(W)x380(D)x560(H)mm, 83kg
Controller Unit 390(W)x325(D)x560(H)mm, 37kg
Rotary Pump 400(W)x160(D)x340(H)mm, 24kg

SNE 3200 M

Electron System
Resolution
15nm (30kV, SE Image)
20nm (30kV, BSE Image)
Magnification 20x~60,000x
Accelerating Voltage 1~30kV (1/5/10/15/20/30)
Detector
Secondary Electron Image(SE)
Backscattered Electron Image(BSE)
Electron Gun Pre-centered Tungsten Filament Cartridge
Stage System
Stage Traverse
3-axis System (X, Y, R, Z, T – Manual)
X, Y-axis : 35mm / R-axis : 360°
* Image Shift : ±150μm
* CCD Camera installed in the Chamber
* T-axis : 0 to 45˚ (Option)
Max. Sample Size 70mm in Diameter x 30mm in Height
Image System
Automation Function
Auto Start, Auto Focus,
Auto Stigmator, Auto Contrast & Brightness
Image Format BMP, JPEG, PNG, TIFF
Vacuum System
Vacuum Mode High & Low Vacuum
Vacuum Pump Rotary Pump / Turbo Molecular Pump (Full Automation)
Dimensions
Main Unit 390(W)x380(D)x560(H)mm, 83kg
Controller Unit 390(W)x325(D)x560(H)mm, 37kg
Rotary Pump 400(W)x160(D)x340(H)mm, 24kg

SNE 4500 M

Resolution 5nm (30kV, SE Image)
Magnification 20x~100,000x
Accelerating Voltage 1~30kV (1/5/10/15/20/30)
Detector Secondary Electron Image(SE)
Electron Gun Pre-centered Tungsten Filament Cartridge
Stage Traverse
5-axis System (X, Y, R, Z, T – Manual)
X, Y-axis : 40mm / R-axis : 360°
Z-axis : 0~35mm / Tilt-axis : 0~45°
* Image Shift : ±150μm
Max. Sample Size 80mm in Diameter x 35mm in Height
Automation Function Auto Start, Auto Focus, Auto Stigmator, Auto Contrast & Brightness
Image Format BMP, JPEG, PNG, TIFF
Vacuum Mode High Vacuum (Low Vacuum Option)
Vacuum Pump Rotary Pump / Turbo Molecular Pump (Full Automation)
Main Unit 390(W)x380(D)x560(H)mm, 88kg
Controller Unit 390(W)x325(D)x560(H)mm, 37kg
Rotary Pump 400(W)x160(D)x340(H)mm, 24kg

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