Product Type:
Parts & Consumables
Application:
Cleaning Accessories
Product Description:
ErgoWRENCH, An ergonomic tool to remove process residue in hard to access sections of vacuum chambers.
- Vacuum Chamber PM SOP’s present unique cleaning challenges. A unique tool used for safer and more efficient scrubbing of hard to reach areas throughout vacuum chambers.
- The soft ergonomic grip provides ease of use, while stiff swivel head can be adjusted to optimize scrubbing angles. Different size Heads and Handles are interchangeable, which allows the ErgoWRENCH® to be adjusted for different applications.
ErgoWRENCH® Heads, Handles & Accessories
FT821 Large Removable 1.5″ Fixed Head
FT821Rn Large Removable 1.5″ Swivel Head
FT822 Medium Non-Removable 1.5″ Fixed Head
FT822R Medium Removable 1.5″ Swivel Head
FT824 Small Non-Removable 1.5″ Fixed Head
FT824R Small Non-Removable 1.5″ Swivel Head
FT830 Removable VAT Valve Head
FT850 0.5″ Round x 6″ Long Handle
FT851 0.5″ Round x 12″ Long Handle
FT852 0.5″ Round x 18″ Long Handle
HT5004 0.45″ x 1.33″ x 3.12″ Foam Grip for Handle
ErgoWRENCH® ScrubPADS® (ErgoWRENCH® Heads and Handles Sold Separately)
HT4528D81 280 Diamond Grit ScrubPAD® Compatible With: FT821/FT821R Size: 1.5″ x 4.25″
HT4536D81 360 Diamond Grit ScrubPAD® Compatible With: FT821/FT821R Size: 1.5″ x 4.25″
HT4580D81 800 Diamond Grit ScrubPAD® Compatible With: FT821/FT821R Size: 1.5″ x 4.25″
HT4528D82 280 Diamond Grit ScrubPAD® Compatible With: FT822/FT822R Size: 1.5″ x 3.25″
HT4536D82 360 Diamond Grit ScrubPAD® Compatible With: FT822/FT822R Size: 1.5″ x 3.25″
HT4528D83 280 Diamond Grit ScrubPAD® Compatible With: FT824/FT824R Size: 1.5″ x 2.5″
HT4536D83 360 Diamond Grit ScrubPAD® Compatible With: FT824/FT824R Size: 1.5″ x 2.5″
HT47818 UltraSOLV® Foam Wiper Compatible With: FT818 Size: 1.5″ x 2.5″
HT57818 360 Diamond Grit ScrubPAD® Compatible With: FT818 Size: 1.5″ x 2.5″
GS48818 MiraWIPE® over Foam Compatible With: FT818 Size: 1.5″ x 2.5″
Please check the Downloads Section for more information and other chamber cleaning tools.
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- cleaning of hard to reach areas such as deposition chambers
- cleaning of VAT valves during PM
- cleaning of heavy deposition build-up areas
- cleaning of areas where low particle emissions are required