Compass SRD Spin Rinse Dryer

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By MEI / RENA

Supplier Info

Product Type:

Equipment

Application:

Wet Process

Product Description:

The Most Advanced Spin Rinse Dryer in the Industry.

The Compass Spin Rinse Dryer offers the most advanced features found in today’s SRD. For high and low profile cassettes, the Compass SRD is designed to reduce operating costs while meeting and/or exceeding all critical areas to include clean, dry and particle performance specifications. IDX Flexware provides advanced process control features, these features can only be found on the Compass SRD from MEI. With greater reliability, performance, and low operating costs coupled with MEI’s award-winning support, the Compass Spin Rinse Dryer is the drying solution you can trust.

Advantages
  • Low Cost of Ownership
  • Designed to reduce facilities cost
  • Reduction in N2 usage
  • Reduction of DI water usage
  • Reduction in process cycle times, increased throughput
  • Off-the shelf parts
Options
  • Host Communications Factory Automation
  • USB Auto-backup
  • Auto door
  • Humidity sensor
  • DI Flow meter
  • Chemicals, DI & N2 inlets

Model Compass SRD Single Compass SRD Double
No. of Dryers One Two
Type Bench or stand-alone Stand-alone
Cassettes Low profile, high profile Low profile, high profile
Chamber Capacity Multiple wafer sizes for low and high profile
cassettes. Available wafer sizes are
dependent upon product carrier type
Door Opening Right, left Right, left
Voltage (per chamber) 240 VAC 50 Hz, 8 A 240 VAC 50 Hz, 15 A
Facilities N2: 1/2” O.D. @ 4–6 CFM, 30–35 PSI
DI: 1/2” O.D. @ 1.5–2 GPM, Max 25–30 PSI
Clean Dry Air: 3/8” OD @ 40–50 PSI, 110–140LPM
Drain Connection: 1” NPT

  • Drying of wafer batch with up to 25 wafers

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