CMP PAD Conditoner

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Product Enquiry Form

By SAESOL (GERMANY, A, CH and UK)

Supplier Info

Product Type:

Parts & Consumables


Application:

CMP Consumables


Product Description:

Product name: Standard

Pad-refreshing consumable for removal of polyurethane pad surface clogging

Target: Semiconductor Chip-Maker (Non-memory, Memory(DRAM/FLASH), Foundries)

Standard: 4.25″ (Stainless Steel, Diamond-Nickel Bonding)

Guaranty Stable Pad Roughness, Long conditioner life time
also product LPX available:

Pad-refreshing consumable for removal of polyurethane pad surface clogging

Target: Semiconductor Chip-Maker (Non-memory, Memory (DRAM/FLASH), Foundries)

LPX: 4.25″ (Stainless Steel, Diamond-Nickel Bonding)

Features: Stable Pad Roughness, Long conditioner life time
Other Conditioners as rings, bars, donut types for all different CMP equipments and suppliers (AMAT, Ebara, LAM Novellus, Strasbaugh)


Standard: No. 6804.21-0000
LPX: No. 6804.21-0000
Products can be delivered as “snap on” or as screw on
Other Conditioners as rings, bars, donut types for all different CMP equipments and suppliers (AMAT, Ebara, LAM Novellus, Strasbaugh)

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Standart product used for:Semiconductor CMP process (ILD, STI, Metal, TSV, Buffing, Barrier, Poly, Gate)

LPX used for: Semiconductor CMP process (STI, Metal)


Product Enquiry Form