The cost of new stripping systems has escalated to unreasonable levels. Trion has solved this critical problem.
The Atlas Stripper is a compact, inexpensive, and versatile system which can be configured for a 200mm or 300mm Chuck. By employing RF bias power, difficult to remove layers of resist can be removed at low temperatures. As required by application, this system can incorporate a microwave source (which is both reliable and free from typical microwave tuning problems) or ICP technology.
- Etch rates up to 6um/min
- High throughput
- Low plasma damage
- Automatic tuning
- 100mm to 300mm wafers
- Small footprint
- Competitively priced
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MEMS, Compound Semiconductor, Pilot Line Production.